Al-Ge reflow sputtering for submicron-contact-hole filling
Keyword(s):
2009 ◽
Vol 29
(8)
◽
pp. 2035-2037
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Keyword(s):
2003 ◽
Vol 6
(9)
◽
pp. C134
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2012 ◽
Vol 62
(9)
◽
pp. 1050-1060
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