Al-Ge reflow sputtering for submicron-contact-hole filling

Author(s):  
K. Kukuta ◽  
T. Kikkawa ◽  
M. Aoki
Keyword(s):  
2009 ◽  
Vol 29 (8) ◽  
pp. 2035-2037 ◽  
Author(s):  
Jian-lei TIAN ◽  
Xu-min LIU ◽  
Yong GUAN

Author(s):  
Xiaodong Chen ◽  
Haitao Liang ◽  
Huaiyuan Xu ◽  
Siyu Ren ◽  
Huaiyu Cai ◽  
...  

2012 ◽  
Vol 62 (9) ◽  
pp. 1050-1060 ◽  
Author(s):  
M.A. Fortes ◽  
P. González ◽  
M. Pasadas ◽  
M.L. Rodríguez
Keyword(s):  

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