A Demonstration of EFAB™ as a Fundamental Shift in the Way Microdevices Are Manufactured
Keyword(s):
The authors introduce the EFAB™ manufacturing process originally invented at the University of Southern California and currently being commercialized by MEMGen Corporation. They discuss its significant recent evolution as an alternative to conventional microdevice manufacturing technologies, suggest a range of geometries and applications that are enabled by this process, and develop the case that EFAB represents a fundamental shift in the way the microdevices are manufactured.
1990 ◽
Vol 54
(2)
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pp. 137-148
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1998 ◽
Vol 62
(9)
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pp. 660-665
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1981 ◽
Vol 24
(1)
◽
pp. 151-151
1996 ◽
Vol 20
(1-2)
◽
pp. 5-9
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Keyword(s):