Lithography-patterning-fidelity-aware electron-optical system design optimization
2011 ◽
Vol 29
(6)
◽
pp. 06FD04
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Keyword(s):
2010 ◽
Vol 49
(6)
◽
pp. 06GE05
◽
Keyword(s):
2017 ◽
2013 ◽
Vol 27
(7)
◽
pp. 2053-2069
◽
Keyword(s):