Low-temperature synthesis of diamond films by photoemission-assisted plasma-enhanced chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4849355 ◽

2014 ◽

Vol 32 (2) ◽

pp. 02B110 ◽

Author(s):

Mayuri Kawata ◽

Yoshihiro Ojiro ◽

Shuichi Ogawa ◽

Tomoaki Masuzawa ◽

Ken Okano ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Low Temperature Synthesis ◽

Temperature Synthesis

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Low-Temperature Synthesis of Diamond Films in Thermoassisted RF Plasma Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.1428 ◽

1992 ◽

Vol 31 (Part 1, No. 5A) ◽

pp. 1428-1431 ◽

Author(s):

Ichiro Watanabe ◽

Takashi Matsushita ◽

Koujyu Sasahara

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Rf Plasma ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition

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Low Temperature Synthesis of Diamond Films in Thermoassisted RF Plasma Chemical Vapor Deposition. II

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.792 ◽

1997 ◽

Vol 36 (Part 1, No. 2) ◽

pp. 792-797

Author(s):

Ichiro Watanabe ◽

Koushin Yoshie

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Rf Plasma ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition

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Low-temperature synthesis of thin graphite sheets using plasma-assisted thermal chemical vapor deposition system

Materials Letters ◽

10.1016/j.matlet.2011.01.045 ◽

2011 ◽

Vol 65 (7) ◽

pp. 1127-1130 ◽

Author(s):

Byeong-Joo Lee ◽

Taeg-Woo Lee ◽

Serin Park ◽

Han-Young Yu ◽

Jeong-O Lee ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Thermal Chemical Vapor Deposition ◽

Graphite Sheets

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Low-temperature synthesis of graphene by chemical vapor deposition and its applications

FlatChem ◽

10.1016/j.flatc.2017.07.002 ◽

2017 ◽

Vol 5 ◽

pp. 40-49 ◽

Author(s):

Myungwoo Son ◽

Moon-Ho Ham

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Temperature Synthesis ◽

Temperature Synthesis

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Mechanism of low-temperature synthesis of carbon films by photo enhanced chemical vapor deposition.

KAGAKU KOGAKU RONBUNSHU ◽

10.1252/kakoronbunshu.16.259 ◽

1990 ◽

Vol 16 (2) ◽

pp. 259-267

Author(s):

Tetsuji Yasuda ◽

Hiroshi Komiyama

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Low Temperature Synthesis ◽

Temperature Synthesis

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Low-Temperature Synthesis of Single-Crystal Germanium Nanowires by Chemical Vapor Deposition

Angewandte Chemie International Edition ◽

10.1002/anie.200290047 ◽

2002 ◽

Vol 41 (24) ◽

pp. 4783-4786 ◽

Author(s):

Dunwei Wang ◽

Hongjie Dai

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Single Crystal ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Germanium Nanowires

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Low-Temperature Synthesis of Single-Crystal Germanium Nanowires by Chemical Vapor Deposition

Angewandte Chemie ◽

10.1002/ange.200290046 ◽

2002 ◽

Vol 114 (24) ◽

pp. 4977-4980 ◽

Author(s):

Dunwei Wang ◽

Hongjie Dai

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Single Crystal ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Germanium Nanowires

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Low-Temperature Synthesis of Single-Crystal Germanium Nanowires by Chemical Vapor Deposition.

10.1002/chin.200316239 ◽

2003 ◽

Vol 34 (16) ◽

Author(s):

Dunwei Wang ◽

Hongjie Dai

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Single Crystal ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Germanium Nanowires

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Low-temperature synthesis of Si nanowires using multizone chemical vapor deposition methods

Applied Physics Letters ◽

10.1063/1.2999591 ◽

2008 ◽

Vol 93 (16) ◽

pp. 163101 ◽

Author(s):

Pengfei Qi ◽

William S. Wong ◽

Huaizhou Zhao ◽

Dunwei Wang

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Si Nanowires ◽

Low Temperature Synthesis ◽

Temperature Synthesis

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Relatively low temperature synthesis of graphene by radio frequency plasma enhanced chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2011.02.069 ◽

2011 ◽

Vol 257 (15) ◽

pp. 6531-6534 ◽

Author(s):

J.L. Qi ◽

W.T. Zheng ◽

X.H. Zheng ◽

X. Wang ◽

H.W. Tian

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Frequency Plasma

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