Review Article: Plasma–surface interactions at the atomic scale for patterning metals

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4993602 ◽

2017 ◽

Vol 35 (5) ◽

pp. 05C203 ◽

Author(s):

Nicholas D. Altieri ◽

Jack Kun-Chieh Chen ◽

Luke Minardi ◽

Jane P. Chang

Keyword(s):

Surface Interactions ◽

Review Article ◽

Atomic Scale ◽

Plasma Surface ◽

Plasma Surface Interactions

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Plasma surface interactions in nanoscale processing: Preservation of low-k integrity and high-k gate-stack etching with Si selectivity

10.31274/etd-180810-312 ◽

2012 ◽

Author(s):

Juline Shoeb

Keyword(s):

Surface Interactions ◽

Plasma Surface ◽

Plasma Surface Interactions ◽

High K ◽

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Numerical modeling of plasma-surface interactions in space vacuum

AIAA Scitech 2020 Forum ◽

10.2514/6.2020-2153 ◽

2020 ◽

Author(s):

Nakul Nuwal ◽

Deborah A. Levin

Keyword(s):

Numerical Modeling ◽

Surface Interactions ◽

Plasma Surface ◽

Plasma Surface Interactions ◽

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Applying scattered-ion spectroscopy to the analyzing of plasma-surface interactions

Bulletin of the Russian Academy of Sciences Physics ◽

10.3103/s1062873812060214 ◽

2012 ◽

Vol 76 (6) ◽

pp. 683-686 ◽

Author(s):

N. V. Mamedov ◽

V. A. Kurnaev ◽

D. V. Ivanov ◽

D. N. Sinel’nikov

Keyword(s):

Surface Interactions ◽

Plasma Surface ◽

Ion Spectroscopy ◽

Plasma Surface Interactions

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Report on the 5th International Conference on Plasma/Surface Interactions in Controlled Fusion Devices, Gatlinburg, Tennessee, May 3–7, 1982

Nuclear Technology - Fusion ◽

10.13182/fst83-a20831 ◽

1983 ◽

Vol 3 (1) ◽

pp. 158-159

Author(s):

Robert A. Langley

Keyword(s):

Surface Interactions ◽

Plasma Surface ◽

International Conference ◽

Plasma Surface Interactions ◽

Controlled Fusion

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Effects of unique ion chemistry on thin-film growth by plasma-surface interactions

Proceedings of the National Academy of Sciences ◽

10.1073/pnas.97.1.23 ◽

2000 ◽

Vol 97 (1) ◽

pp. 23-27 ◽

Author(s):

M. B. J. Wijesundara ◽

L. Hanley ◽

B. Ni ◽

S. B. Sinnott

Keyword(s):

Thin Film ◽

Film Growth ◽

Surface Interactions ◽

Thin Film Growth ◽

Ion Chemistry ◽

Plasma Surface ◽

Plasma Surface Interactions

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Plasma Reactivity and Plasma-Surface Interactions During Treatment of Toluene by a Dielectric Barrier Discharge

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-008-9135-1 ◽

2008 ◽

Vol 28 (4) ◽

pp. 429-466 ◽

Author(s):

N. Blin-Simiand ◽

F. Jorand ◽

L. Magne ◽

S. Pasquiers ◽

C. Postel ◽

...

Keyword(s):

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Surface Interactions ◽

Dielectric Barrier ◽

Plasma Surface ◽

Plasma Surface Interactions

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Effect of plasma‐surface interactions on the radial variation of H atom density in a hydrogen radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.357722 ◽

1994 ◽

Vol 76 (3) ◽

pp. 1476-1479 ◽

Author(s):

B. N. Ganguly ◽

P. Bletzinger

Keyword(s):

Radio Frequency ◽

Surface Interactions ◽

Radial Variation ◽

Atom Density ◽

Plasma Surface ◽

Plasma Surface Interactions ◽

Radio Frequency Discharge

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Section 3: Basic Processes: Plasma/Surface Interactions

Handbook of Industrial Diamonds and Diamond Films ◽

10.1201/9780203752807-14 ◽

2018 ◽

pp. 615-630

Author(s):

A. Gicquel

Keyword(s):

Surface Interactions ◽

Plasma Surface ◽

Plasma Surface Interactions

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Fundamental Processes of Plasma–Surface Interactions

Advances In Atomic, Molecular, and Optical Physics - Fundamentals of Plasma Chemistry ◽

10.1016/s1049-250x(08)60129-9 ◽

2000 ◽

pp. 341-371

Author(s):

Rainer Hippler

Keyword(s):

Surface Interactions ◽

Plasma Surface ◽

Plasma Surface Interactions

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1-5 The Contribution of Sputtering to Our Knowledge of Plasma-Surface Interactions

Adhesion, or Cold Welding, of Materials in Space Environments ◽

10.1520/stp45157s ◽

2009 ◽

pp. 3-3-3

Author(s):

G. K. Wehner

Keyword(s):

Surface Interactions ◽

Plasma Surface ◽

Plasma Surface Interactions

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