Plasma polymerization by magnetron glow discharge. III. Effect of magnetic field on sputtering characteristics of electrode materials
1989 ◽
Vol 7
(5)
◽
pp. 2960-2965
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1989 ◽
Vol 7
(6)
◽
pp. 3188-3196
◽
1989 ◽
Vol 7
(2)
◽
pp. 195-201
◽
Keyword(s):
Keyword(s):
Keyword(s):
1977 ◽
Vol 43
(5)
◽
pp. 1729-1735
◽