Comments on: ‘‘Grain boundary diffusion of phosphorus in polycrystalline silicon’’

1983 ◽  
Vol 1 (1) ◽  
pp. 107 ◽  
Author(s):  
Herbert F. Mataré
Keyword(s):  
Grain Boundary ◽  
Polycrystalline Silicon ◽  
Boundary Diffusion ◽  
Grain Boundary Diffusion

Grain boundary diffusion of aluminum in polycrystalline silicon films

1980 ◽  
Vol 51 (3) ◽  
pp. 1576-1581 ◽  
Author(s):  
J. C. M. Hwang ◽  
P. S. Ho ◽  
J. E. Lewis ◽  
D. R. Campbell
Keyword(s):  
Grain Boundary ◽  
Polycrystalline Silicon ◽  
Boundary Diffusion ◽  
Grain Boundary Diffusion ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Boron Diffusion in Polycrystalline Silicon

1986 ◽  
Vol 76 ◽  
Author(s):  
Moustafa Y. Ghannam ◽  
Robert W. Dutton ◽  
Steven W. Novak
Keyword(s):  
Grain Size ◽  
Diffusion Coefficient ◽  
Grain Boundary ◽  
Grain Boundaries ◽  
Polycrystalline Silicon ◽  
Boundary Diffusion ◽  
Crystalline Silicon ◽  
Unit Area ◽  
Grain Boundary Diffusion ◽  
Boron Diffusion

ABSTRACTThe diffusion of boron in ion implanted LPCVD polycrystalline silicon is shown to be dominated by grain boundary diffusion at low and moderate concentrations. The diffusion coefficient is 2 to 3 orders of magnitude larger than its value in crystalline silicon. In preannealed polysilicon, the boron diffusion coefficient is found to be 30% smaller than in polysilicon annealed after implantation. This reflects the effect of the grain size in the diffusion coefficient since preannealed polysilicon has larger grains and smaller density of grain boundaries per unit area.

GRAIN BOUNDARY DIFFUSION IN POLYCRYSTALLINE SILICON FILMS ON SiO2

1982 ◽  
Vol 43 (C1) ◽  
pp. C1-363-C1-368 ◽  
Author(s):  
H. Baumgart ◽  
H. J. Leamy ◽  
G. K. Celler ◽  
L. E. Trimble
Keyword(s):  
Grain Boundary ◽  
Polycrystalline Silicon ◽  
Boundary Diffusion ◽  
Grain Boundary Diffusion ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

GRAIN BOUNDARY DIFFUSION OF BULK INTERSTITIALS IN ALPHA-ZIRCONIUM

1990 ◽  
Vol 51 (C1) ◽  
pp. C1-691-C1-696 ◽  
Author(s):  
K. VIEREGGE ◽  
R. WILLECKE ◽  
Chr. HERZIG
Keyword(s):  
Grain Boundary ◽  
Boundary Diffusion ◽  
Grain Boundary Diffusion

Room-temperature grain boundary diffusion data measured from historical artifacts

2005 ◽  
Vol 96 (10) ◽  
pp. 1187-1192 ◽  
Author(s):  
Raymond J. Kremer ◽  
Mysore A. Dayananda ◽  
Alexander H. King
Keyword(s):  
Grain Boundary ◽  
Room Temperature ◽  
Boundary Diffusion ◽  
Grain Boundary Diffusion ◽  
Diffusion Data
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