Three-dimensional modeling of low-dose BF+2 implantation into single-crystalline silicon

1996 ◽  
Vol 14 (1) ◽  
pp. 278 ◽  
Author(s):  
C. S. Murthy
Keyword(s):  
Low Dose ◽  
Crystalline Silicon ◽  
Three Dimensional ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Three Dimensional Modeling ◽  
Dimensional Modeling

Recombination Characteristics of Single-Crystalline Silicon Wafers with a Damaged Near-Surface Layer

2013 ◽  
Vol 58 (2) ◽  
pp. 142-150 ◽  
Author(s):  
A.V. Sachenko ◽  
◽  
V.P. Kostylev ◽  
V.G. Litovchenko ◽  
V.G. Popov ◽  
...  
Keyword(s):  
Surface Layer ◽  
Crystalline Silicon ◽  
Silicon Wafers ◽  
Single Crystalline Silicon ◽  
Near Surface ◽  
Single Crystalline
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