Low voltage electron-beam lithography based InGaAs/GaAs quantum dot arrays with 1 meV luminescence linewidths

1997 ◽  
Vol 15 (6) ◽  
pp. 2829 ◽  
Author(s):  
K. H. Wang
Keyword(s):  
Electron Beam ◽  
Quantum Dot ◽  
Electron Beam Lithography ◽  
Low Voltage ◽  
Voltage Electron ◽  
Gaas Quantum Dot

Low voltage electron beam lithography in self‐assembled ultrathin films with the scanning tunneling microscope

1994 ◽  
Vol 64 (3) ◽  
pp. 390-392 ◽  
Author(s):  
C. R. K. Marrian ◽  
F. K. Perkins ◽  
S. L. Brandow ◽  
T. S. Koloski ◽  
E. A. Dobisz ◽  
...  
Keyword(s):  
Electron Beam ◽  
Ultrathin Films ◽  
Electron Beam Lithography ◽  
Scanning Tunneling Microscope ◽  
Low Voltage ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Voltage Electron ◽  
Self Assembled

Low-voltage electron-beam lithography linked to photolithography

1995 ◽  
Author(s):  
Lothar Bauch ◽  
Monika Boettcher ◽  
Ulrich Haak ◽  
Ulrich A. Jagdhold
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Low Voltage ◽  
Voltage Electron

A special method to create gratings of variable line density by low voltage electron beam lithography

1996 ◽  
Vol 30 (1-4) ◽  
pp. 49-52 ◽  
Author(s):  
B. Niemann ◽  
T. Wilhein ◽  
T. Schliebe ◽  
R. Plontke ◽  
O. Fortagne ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Low Voltage ◽  
Special Method ◽  
Line Density ◽  
Variable Line ◽  
Voltage Electron
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