Pulsed plasma polymerization of an aromatic perfluorocarbon monomer: Formation of low dielectric constant, high thermal stability films

Author(s):  
Licheng M. Han ◽  
Richard B. Timmons ◽  
Wei W. Lee
1998 ◽  
Vol 84 (1) ◽  
pp. 439-444 ◽  
Author(s):  
Licheng M. Han ◽  
Richard B. Timmons ◽  
Wei W. Lee ◽  
Yuanye Chen ◽  
Zhibing Hu

2014 ◽  
Vol 143 (2) ◽  
pp. 773-778 ◽  
Author(s):  
Chenyi Wang ◽  
Wentao Chen ◽  
Yunyun Chen ◽  
Xiaoyan Zhao ◽  
Jian Li ◽  
...  

2015 ◽  
Vol 17 (4) ◽  
pp. 2416-2420 ◽  
Author(s):  
Min Kyu Kim ◽  
Dong Won Kim ◽  
Dong Wook Shin ◽  
Sang Joon Seo ◽  
Ho Kyoon Chung ◽  
...  

A hollow SiO2 sphere and polyimide hybrid with a low dielectric constant and high thermal stability is useful for flexible insulators.


RSC Advances ◽  
2014 ◽  
Vol 4 (80) ◽  
pp. 42737-42746 ◽  
Author(s):  
Seongku Kim ◽  
Xingyuan Wang ◽  
Shinji Ando ◽  
Xiaogong Wang

The hybrid ternary composites with low dielectric constant and high thermal stability were fabricated through composition optimization by introducing suitable amounts of inorganic silica and hyperbranched polyimide into a linear polyimide system.


2001 ◽  
Vol 682 ◽  
Author(s):  
Max D. Alexander ◽  
Thuy D. Dang ◽  
Christina E. Specker ◽  
Marlene Houtz ◽  
R.J. Spry ◽  
...  

ABSTRACTNext generation microelectronic packaging requirements are driving the need to produce increasingly lower dielectric constant materials while maintaining high thermal stability and ease of processing. Polymer candidates with exceptionally low dielectric constant (2.0-2.4), high thermal stability (degradation temperature higher than 400°C), high glass transition temperature (greater than 350°C), low water uptake (less than one percent), solubility in selected organic solvents, and low thermal expansion are all required. We have successfully synthesized and characterized several candidate polymers in an effort to address these needs.


Sign in / Sign up

Export Citation Format

Share Document