Influences of etching chemical parameters on AlGaN/GaN electrical degradation in power devices
2021 ◽
Vol 39
(6)
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pp. 063201
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2012 ◽
Vol 2
(10)
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pp. 1-3
2019 ◽
Vol 139
(9)
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pp. 1015-1019
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2011 ◽
Vol 131
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pp. 219-224
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Vol 134
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