Optoelectronic characterization of shape and deformation of MEMS accelerometers used in transportation applications
2005 ◽
Vol 1
(1)
◽
pp. 63-82
◽
Keyword(s):
2009 ◽
Vol 5
(6)
◽
pp. 663-679
◽
2020 ◽
Vol 1589
◽
pp. 012011
Keyword(s):
1974 ◽
Vol 32
◽
pp. 254-255