Self-aligned rim-type phase-shift mask fabrication by backside exposure
1995 ◽
Keyword(s):
1994 ◽
Vol 33
(Part 1, No. 12B)
◽
pp. 6779-6784
◽
2010 ◽
Vol 5
(3)
◽
pp. 233-237
◽
Keyword(s):