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Preliminary study of 65 nm node alternating phase-shift mask fabrication
Mapping Intimacies
◽
10.1117/12.467487
◽
2002
◽
Author(s):
Kouji Hosono
◽
Naoyuki Ishiwata
◽
Satoru Asai
◽
Hiroshi Maruyama
◽
Yutaka Miyahara
◽
...
Keyword(s):
Phase Shift
◽
Preliminary Study
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
◽
Mask Fabrication
Download Full-text
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Practical phase control technique for alternating phase-shift mask fabrication
10.1117/12.392040
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2000
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Author(s):
Masahiko Takahashi
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Akihiro Miyake
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Phase Shift
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Application of alternating phase shift mask to device fabrication
10.1117/12.209281
◽
1995
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Sunggi Kim
◽
Sang-Gyun Woo
◽
Woo-Sung Han
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Young-Bum Koh
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Phase Shift
◽
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Phase Shift Mask
◽
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Introduction of full-level alternating phase-shift mask technology into IC manufacturing
10.1117/12.474639
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2002
◽
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Marco Ahrens
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Wolfgang Dettmann
◽
M. Heissmeier
◽
Mario Hennig
◽
...
Keyword(s):
Phase Shift
◽
Ic Manufacturing
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
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Highly selective dry etching of alternating phase-shift mask (PSM) structures for extreme ultraviolet lithography (EUVL) using inductively coupled plasmas (ICP)
Thin Solid Films
◽
10.1016/j.tsf.2009.01.119
◽
2009
◽
Vol 517
(14)
◽
pp. 3938-3941
Author(s):
H.Y. Jung
◽
Y.R. Park
◽
H.J. Lee
◽
N.-E. Lee
◽
C.Y. Jeong
◽
...
Keyword(s):
Phase Shift
◽
Extreme Ultraviolet
◽
Dry Etching
◽
Extreme Ultraviolet Lithography
◽
Inductively Coupled Plasmas
◽
Ultraviolet Lithography
◽
Inductively Coupled
◽
Coupled Plasmas
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
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Technological challenges in implementation of alternating phase-shift mask
10.1117/12.410720
◽
2001
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Author(s):
Wilman Tsai
◽
Qi-De Qian
◽
Ken M. Buckmann
◽
Wen-Hao Cheng
◽
Long He
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Keyword(s):
Phase Shift
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Phase Shift Mask
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Alternating Phase Shift Mask
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New double exposure technique without alternating phase-shift mask
10.1117/12.711956
◽
2007
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Author(s):
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◽
Teruyoshi Yao
◽
Hiroki Futatsuya
◽
Tatsuo Chijimatsu
◽
Satoru Asai
Keyword(s):
Phase Shift
◽
Double Exposure
◽
Phase Shift Mask
◽
Exposure Technique
◽
Alternating Phase Shift Mask
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Measurement Method for Odd Component of Aberration Function Utilizing Alternating Phase Shift Mask
Japanese Journal of Applied Physics
◽
10.1143/jjap.37.6709
◽
1998
◽
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◽
pp. 6709-6713
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Author(s):
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◽
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◽
Kouichirou Tsujita
◽
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Keyword(s):
Phase Shift
◽
Measurement Method
◽
Phase Shift Mask
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Alternating Phase Shift Mask
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Investigation of Optimum Biasing and Undercut for Single Trench Alternating Phase Shift Mask in 193 nm Lithography
Japanese Journal of Applied Physics
◽
10.1143/jjap.45.8920
◽
2006
◽
Vol 45
(11)
◽
pp. 8920-8924
◽
Cited By ~ 1
Author(s):
Ji-Eun Lee
◽
Hye-Young Kang
◽
Dong-Soo Shin
◽
Hee-Jun Jeong
◽
Ilsin An
◽
...
Keyword(s):
Phase Shift
◽
193 Nm
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
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Integration of alternating phase-shift mask technology into optical proximity correction
10.1117/12.354367
◽
1999
◽
Cited By ~ 1
Author(s):
Joerg Thiele
◽
Christoph M. Friedrich
◽
Christoph Dolainsky
◽
Paul Karakatsanis
◽
Wilhelm Maurer
Keyword(s):
Phase Shift
◽
Optical Proximity Correction
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
Phase controllability improvement for alternating phase shift mask
10.1117/12.332833
◽
1998
◽
Author(s):
Masami Nara
◽
Toshifumi Yokoyama
◽
Hiroshi Fujita
◽
Hiroyuki Miyashita
◽
Naoya Hayashi
Keyword(s):
Phase Shift
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Phase Shift Mask
◽
Alternating Phase Shift Mask
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