Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

Applied Optics ◽

10.1364/ao.43.004157 ◽

2004 ◽

Vol 43 (21) ◽

pp. 4157 ◽

Author(s):

Ryo Shinozaki ◽

Osami Sasaki ◽

Takamasa Suzuki

Keyword(s):

Surface Profile ◽

Profile Measurement ◽

Scanning Method ◽

One Dimensional ◽

Angular Deflection ◽

Dimensional Surface ◽

Surface Profile Measurement

Download Full-text

One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam

10.1117/12.577647 ◽

2005 ◽

Author(s):

Ryo Shinozaki ◽

Osami Sasaki ◽

Takamasa Suzuki

Keyword(s):

Surface Profile ◽

Profile Measurement ◽

Scanning Method ◽

One Dimensional ◽

Angular Deflection ◽

Dimensional Surface ◽

Surface Profile Measurement

Download Full-text

One-dimensional surface profile measurement by detection of reflecting direction of a scanned laser beam

10.1117/12.2020983 ◽

2013 ◽

Author(s):

Osami Sasaki ◽

Ryo Shinozaki ◽

Takamasa Suzuki

Keyword(s):

Surface Profile ◽

Profile Measurement ◽

One Dimensional ◽

Dimensional Surface ◽

Surface Profile Measurement

Download Full-text

A Non-Contact Method For Surface Profile Measurement And Angular Deflection Monitoring Using A Scanning Laser Beam

10.1117/12.938210 ◽

1978 ◽

Author(s):

Francisco M. Smolka ◽

Thomas P. Caudell

Keyword(s):

Surface Profile ◽

Scanning Laser ◽

Profile Measurement ◽

Contact Method ◽

Angular Deflection ◽

Surface Profile Measurement

Download Full-text

Surface profile measurement and angular deflection monitoring using a scanning laser beam: a noncontact method

Applied Optics ◽

10.1364/ao.17.003284 ◽

1978 ◽

Vol 17 (20) ◽

pp. 3284 ◽

Author(s):

F. M. Smolka ◽

T. P. Caudell

Keyword(s):

Surface Profile ◽

Scanning Laser ◽

Profile Measurement ◽

Angular Deflection ◽

Noncontact Method ◽

Surface Profile Measurement

Download Full-text

Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor

Precision Engineering ◽

10.1016/j.precisioneng.2019.11.009 ◽

2020 ◽

Vol 62 ◽

pp. 62-70 ◽

Author(s):

Meiyun Chen ◽

Shengli Xie ◽

Heng Wu ◽

Satoru Takahashi ◽

Kiyoshi Takamasu

Keyword(s):

Cylindrical Surface ◽

Three Dimensional ◽

Surface Profile ◽

Profile Measurement ◽

Angle Sensor ◽

Dimensional Surface ◽

Surface Profile Measurement

Download Full-text

A New Quantitative Method of Shot Peening Coverage Measurement with Utilization of Laser Beam Surface Profile Measurement

Transactions of Japan Society of Spring Engineers ◽

10.5346/trbane.2009.49 ◽

2009 ◽

pp. 49-52

Author(s):

Ayamitsu AMANO ◽

Yuichi HIRATA ◽

Masami WAKITA

Keyword(s):

Shot Peening ◽

Quantitative Method ◽

Surface Profile ◽

Profile Measurement ◽

Beam Surface ◽

Coverage Measurement ◽

Surface Profile Measurement

Download Full-text

Three-dimensional surface profile measurement by using liquid crystal grating with triangular intensity distribution patterns

10.1117/12.467400 ◽

2002 ◽

Author(s):

Hiroo Fujita ◽

Akira Suguro ◽

Toru Yoshizawa

Keyword(s):

Liquid Crystal ◽

Intensity Distribution ◽

Three Dimensional ◽

Surface Profile ◽

Distribution Patterns ◽

Profile Measurement ◽

Liquid Crystal Grating ◽

Dimensional Surface ◽

Surface Profile Measurement

Download Full-text

Three-dimensional surface profile measurement of a moving object by a spatial-offset phase stepping method

Optical Engineering ◽

10.1117/1.1525279 ◽

2003 ◽

Vol 42 (1) ◽

pp. 137 ◽

Author(s):

Satoru Yoneyama

Keyword(s):

Three Dimensional ◽

Surface Profile ◽

Moving Object ◽

Profile Measurement ◽

Phase Stepping ◽

Phase Stepping Method ◽

Dimensional Surface ◽

Surface Profile Measurement

Download Full-text

Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer

Optical Engineering ◽

10.1117/12.173561 ◽

1994 ◽

Vol 33 (8) ◽

pp. 2754 ◽

Author(s):

Takamasa Suzuki

Keyword(s):

Real Time ◽

Laser Diode ◽

Surface Profile ◽

Profile Measurement ◽

Two Dimensional ◽

Sinusoidal Phase Modulating ◽

Dimensional Surface ◽

Surface Profile Measurement

Download Full-text

Surface profile measurement of a diffraction grating by a laser beam scanning interferometer using sinusoidal phase modulation

10.1117/12.2025328 ◽

2013 ◽

Author(s):

Osami Sasaki ◽

Takuya Kubota ◽

Samuel Choi ◽

Takamasa Suzuki

Keyword(s):

Diffraction Grating ◽

Phase Modulation ◽

Surface Profile ◽

Profile Measurement ◽

Beam Scanning ◽

Scanning Interferometer ◽

Laser Beam Scanning ◽

Surface Profile Measurement

Download Full-text