Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

2004 ◽  
Vol 43 (21) ◽  
pp. 4157 ◽  
Author(s):  
Ryo Shinozaki ◽  
Osami Sasaki ◽  
Takamasa Suzuki
Keyword(s):  
Laser Beam ◽  
Surface Profile ◽  
Profile Measurement ◽  
Scanning Method ◽  
One Dimensional ◽  
Angular Deflection ◽  
Dimensional Surface ◽  
Surface Profile Measurement

Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor

2020 ◽  
Vol 62 ◽  
pp. 62-70 ◽  
Author(s):  
Meiyun Chen ◽  
Shengli Xie ◽  
Heng Wu ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu
Keyword(s):  
Cylindrical Surface ◽  
Three Dimensional ◽  
Surface Profile ◽  
Profile Measurement ◽  
Beam Angle ◽  
Angle Sensor ◽  
Dimensional Surface ◽  
Surface Profile Measurement
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