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Evaluation of image-placement distortion contributors of the EL-3+ electron-beam lithography system in x-ray mask fabrication
Mapping Intimacies
◽
10.1117/12.195806
◽
1994
◽
Author(s):
Denise M. Puisto
◽
Mark Lawliss
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
X Ray
◽
Lithography System
◽
Mask Fabrication
Download Full-text
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References
High resolution x-ray mask fabrication by a 100 keV electron-beam lithography system
Journal of Micromechanics and Microengineering
◽
10.1088/0960-1317/14/5/010
◽
2004
◽
Vol 14
(5)
◽
pp. 722-726
◽
Cited By ~ 9
Author(s):
Lin Wang
◽
Yohannes M Desta
◽
Rainer K Fettig
◽
Jost Goettert
◽
Herbert Hein
◽
...
Keyword(s):
Electron Beam
◽
High Resolution
◽
Electron Beam Lithography
◽
X Ray
◽
Lithography System
◽
Mask Fabrication
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Patterning tungsten films with an electron beam lithography system at 50 keV for x-ray mask applications
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.585306
◽
1991
◽
Vol 9
(6)
◽
pp. 3292
◽
Cited By ~ 3
Author(s):
K. W. Rhee
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
X Ray
◽
Lithography System
Download Full-text
High precision mask fabrication for deep X-ray lithography using 40-kV shaped electron beam lithography
Microelectronic Engineering
◽
10.1016/s0167-9317(01)00479-8
◽
2001
◽
Vol 57-58
◽
pp. 761-767
◽
Cited By ~ 5
Author(s):
Andreas Schmidt
◽
Gerhard Himmelsbach
◽
Regina Lüttge
◽
Dieter Adam
◽
Falk Hoke
◽
...
Keyword(s):
Electron Beam
◽
High Precision
◽
Electron Beam Lithography
◽
X Ray
◽
Mask Fabrication
Download Full-text
Line stitching in servo-assisted electron beam lithography system
2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
◽
10.1109/aim.2011.6027026
◽
2011
◽
Author(s):
Jia-Yush Yen
◽
Lien-Sheng Chen
◽
Pablo Chiu
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
Lithography System
Download Full-text
A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
Microelectronic Engineering
◽
10.1016/0167-9317(91)90069-p
◽
1991
◽
Vol 13
(1-4)
◽
pp. 165-172
◽
Cited By ~ 3
Author(s):
M.G. Rosenfield
◽
S.A. Rishton
◽
D.P. Kern
◽
D.E. Seeger
◽
C.A. Whiting
Keyword(s):
Electron Beam
◽
Proximity Effects
◽
High Electron
◽
X Ray
◽
Mask Fabrication
Download Full-text
X-ray zone plates fabricated using electron beam lithography and reactive ion etching
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.583242
◽
1985
◽
Vol 3
(1)
◽
pp. 265
◽
Cited By ~ 6
Author(s):
H. Aritome
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
Reactive Ion Etching
◽
Ion Etching
◽
X Ray
◽
Zone Plates
Download Full-text
Predicting in-plane distortion from electron-beam lithography on x-ray mask membranes
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.589042
◽
1996
◽
Vol 14
(6)
◽
pp. 4308
◽
Cited By ~ 4
Author(s):
D. L. Laird
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
X Ray
Download Full-text
Design of soft x-ray varied-line-spacing grating based on electron beam lithography-near field lithography
10.1117/12.2246356
◽
2016
◽
Author(s):
Dakui Lin
◽
Huoyao Chen
◽
Stefanie Kroker
◽
Thomas Käsebier
◽
Zhengkun Liu
◽
...
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
Near Field
◽
X Ray
◽
Line Spacing
Download Full-text
Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography
Optics & Laser Technology
◽
10.1016/j.optlastec.2011.11.051
◽
2012
◽
Vol 44
(6)
◽
pp. 1649-1653
◽
Cited By ~ 12
Author(s):
Chenchen Luo
◽
Yigui Li
◽
Sugiyama Susumu
Keyword(s):
Electron Beam
◽
Aspect Ratio
◽
High Aspect Ratio
◽
Electron Beam Lithography
◽
X Ray
◽
Subwavelength Gratings
Download Full-text
Mask fabrication by electron-beam lithography
Electron-Beam Technology in Microelectronic Fabrication
◽
10.1016/b978-0-12-133550-2.50010-9
◽
1980
◽
pp. 259-307
◽
Cited By ~ 2
Author(s):
J.P. BALLANTYNE
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
Mask Fabrication
Download Full-text
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