High precision double-interferometry displacement measurement by waveform transforming based on FFT

2002 ◽

Author(s):

Y. Jourlin ◽

O. Parriaux ◽

F. Pigeon

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Measurement Sensor ◽

Intelligent Robots

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A high-precision laser displacement measurement system

10.1117/12.2606551 ◽

2021 ◽

Author(s):

Wenqing Pan ◽

Dengwei Zhang ◽

Cui Liang ◽

Chao Ma ◽

Xiaowu Shu ◽

...

Keyword(s):

High Precision ◽

Measurement System ◽

Displacement Measurement

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High precision displacement measurement algorithmbased on depth fusion of grating projection pattern

Applied Optics ◽

10.1364/ao.447967 ◽

2022 ◽

Author(s):

Hai Yu ◽

WAN Hua ◽

LU Xinran ◽

DU Cai ◽

Liang Lihui

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Projection Pattern

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Optic Grating Sensor Based High Precision Straight-line Displacement Measurement and Its Error Analysis

Proceedings of the 2019 International Conference on Modeling, Simulation, Optimization and Numerical Techniques (SMONT 2019) ◽

10.2991/smont-19.2019.48 ◽

2019 ◽

Author(s):

Songlin Wu ◽

Lei Dang ◽

Qian Yang ◽

Bochen Bai ◽

Longfei Gao

Keyword(s):

Error Analysis ◽

High Precision ◽

Displacement Measurement ◽

Straight Line

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Non-contact and high-precision displacement measurement based on tunnel magnetoresistance

Measurement Science and Technology ◽

10.1088/1361-6501/ab662b ◽

2020 ◽

Vol 31 (6) ◽

pp. 065102

Author(s):

Lunan Liu ◽

Yikun Yang ◽

Bintang Yang

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Tunnel Magnetoresistance

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Long stroke displacement measurement with reduced coupling error supporting high precision control of a beam flexure-based micro-stage

Review of Scientific Instruments ◽

10.1063/5.0009965 ◽

2020 ◽

Vol 91 (7) ◽

pp. 073701

Author(s):

Shuaishuai Lu ◽

Peng Yan ◽

Bei Zhang

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Precision Control ◽

Long Stroke ◽

Coupling Error

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Guidance characteristics of some displacement devices used in a high-precision He–Ne laser displacement measurement system

Review of Scientific Instruments ◽

10.1063/1.1148219 ◽

1997 ◽

Vol 68 (7) ◽

pp. 2913-2914

Author(s):

U. Brand ◽

K. Miyashita ◽

J. Hannemann

Keyword(s):

High Precision ◽

Measurement System ◽

Displacement Measurement

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High precision displacement measurement by statistical interferometry

Optics & Laser Technology ◽

10.1016/0030-3992(94)90073-6 ◽

1994 ◽

Vol 26 (6) ◽

pp. 425

Author(s):

Yoshinori Bitou ◽

Hirohumi Kadono ◽

Satoru Toyooka

Keyword(s):

High Precision ◽

Displacement Measurement

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High precision capacitance displacement measurement circuit design

Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering ◽

10.2991/ic3me-15.2015.206 ◽

2015 ◽

Author(s):

Xuefeng Xing ◽

Jianqiang Li ◽

Shixue Lv ◽

Linlin Xu ◽

Xiaopu Zhang

Keyword(s):

Circuit Design ◽

High Precision ◽

Displacement Measurement ◽

Measurement Circuit

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A three-dimension high-precision and non-contact dynamic angular displacement measurement system based on heterodyne interference

Optical Metrology and Inspection for Industrial Applications VI ◽

10.1117/12.2536959 ◽

2019 ◽

Cited By ~ 1

Author(s):

Shuai Zhao ◽

Dengwei Zhang ◽

Yilan Zhou ◽

Xiaowu Shu

Keyword(s):

High Precision ◽

Measurement System ◽

Angular Displacement ◽

Displacement Measurement ◽

Three Dimension

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High precision double-interferometry displacement measurement by waveform transforming based on FFT

High precision and non obtrusive displacement measurement sensor for intelligent robots and systems

A high-precision laser displacement measurement system

High precision displacement measurement algorithmbased on depth fusion of grating projection pattern

Optic Grating Sensor Based High Precision Straight-line Displacement Measurement and Its Error Analysis

Non-contact and high-precision displacement measurement based on tunnel magnetoresistance

Long stroke displacement measurement with reduced coupling error supporting high precision control of a beam flexure-based micro-stage

Guidance characteristics of some displacement devices used in a high-precision He–Ne laser displacement measurement system

High precision displacement measurement by statistical interferometry

High precision capacitance displacement measurement circuit design

A three-dimension high-precision and non-contact dynamic angular displacement measurement system based on heterodyne interference

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