Long stroke displacement measurement with reduced coupling error supporting high precision control of a beam flexure-based micro-stage

Review of Scientific Instruments ◽

10.1063/5.0009965 ◽

2020 ◽

Vol 91 (7) ◽

pp. 073701

Author(s):

Shuaishuai Lu ◽

Peng Yan ◽

Bei Zhang

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Precision Control ◽

Long Stroke ◽

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Research on high precision control system of a hybrid five-bar actuator

International Technology and Innovation Conference 2006 (ITIC 2006) ◽

10.1049/cp:20061128 ◽

2006 ◽

Author(s):

Zhang Ke

Keyword(s):

Control System ◽

High Precision ◽

Precision Control

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High precision double-interferometry displacement measurement by waveform transforming based on FFT

10.1117/12.2038063 ◽

2013 ◽

Author(s):

Yunzhi Wang ◽

Fang Xie ◽

Sen Ma

Keyword(s):

High Precision ◽

Displacement Measurement

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High precision control for linear motor-based container transfer system with cogging force and friction

30th Annual Conference of IEEE Industrial Electronics Society, 2004. IECON 2004 ◽

10.1109/iecon.2004.1432288 ◽

2005 ◽

Author(s):

Jin-Woo Lee ◽

Jin-Ho Suh ◽

Young-Jin Lee ◽

Kwon-Soon Lee

Keyword(s):

High Precision ◽

Linear Motor ◽

Transfer System ◽

Precision Control

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High precision and non obtrusive displacement measurement sensor for intelligent robots and systems

ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597) ◽

10.1109/etfa.2001.997781 ◽

2002 ◽

Author(s):

Y. Jourlin ◽

O. Parriaux ◽

F. Pigeon

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Measurement Sensor ◽

Intelligent Robots

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A high-precision laser displacement measurement system

10.1117/12.2606551 ◽

2021 ◽

Author(s):

Wenqing Pan ◽

Dengwei Zhang ◽

Cui Liang ◽

Chao Ma ◽

Xiaowu Shu ◽

...

Keyword(s):

High Precision ◽

Measurement System ◽

Displacement Measurement

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High precision displacement measurement algorithmbased on depth fusion of grating projection pattern

Applied Optics ◽

10.1364/ao.447967 ◽

2022 ◽

Author(s):

Hai Yu ◽

WAN Hua ◽

LU Xinran ◽

DU Cai ◽

Liang Lihui

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Projection Pattern

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High-precision control of the observation satellite with small power consumption

Russian Aeronautics ◽

10.3103/s1068799808010042 ◽

2008 ◽

Vol 51 (1) ◽

pp. 16-25

Author(s):

A. S. Meshchanov

Keyword(s):

Power Consumption ◽

High Precision ◽

Precision Control ◽

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A concurrent design of input shaping technique and a robust control for high-speed/high-precision control of a chip mounter

Control Engineering Practice ◽

10.1016/s0967-0661(01)00092-2 ◽

2001 ◽

Vol 9 (12) ◽

pp. 1279-1285 ◽

Author(s):

Pyung Hun Chang ◽

Juyi Park

Keyword(s):

Robust Control ◽

High Precision ◽

Input Shaping ◽

Concurrent Design ◽

Precision Control ◽

Shaping Technique

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Improvement of the inverse dynamics method for high-precision control of nonlinear objects under conditions of uncertainty

Eastern-European Journal of Enterprise Technologies ◽

10.15587/1729-4061.2019.160345 ◽

2019 ◽

Vol 2 (2 (98)) ◽

pp. 55-62

Author(s):

Oleksandr Blintsov ◽

Zhanna Burunina ◽

Andrii Voitasyk

Keyword(s):

High Precision ◽

Inverse Dynamics ◽

Precision Control ◽

Dynamics Method

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Optic Grating Sensor Based High Precision Straight-line Displacement Measurement and Its Error Analysis

Proceedings of the 2019 International Conference on Modeling, Simulation, Optimization and Numerical Techniques (SMONT 2019) ◽

10.2991/smont-19.2019.48 ◽

2019 ◽

Author(s):

Songlin Wu ◽

Lei Dang ◽

Qian Yang ◽

Bochen Bai ◽

Longfei Gao

Keyword(s):

Error Analysis ◽

High Precision ◽

Displacement Measurement ◽

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