Machine learning for mask/wafer hotspot detection and mask synthesis

2020 ◽

Author(s):

Aliaa Kabeel ◽

Wael ElManhawy ◽

Joe Kwan ◽

Asmaa Rabie ◽

Mohamed Ismail ◽

...

Keyword(s):

Machine Learning ◽

Hotspot Detection ◽

Improve Accuracy

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Metrics for characterizing machine learning-based hotspot detection methods

2011 12th International Symposium on Quality Electronic Design ◽

10.1109/isqed.2011.5770713 ◽

2011 ◽

Cited By ~ 1

Author(s):

Jen-Yi Wuu ◽

Fedor G. Pikus ◽

Malgorzata Marek-Sadowska

Keyword(s):

Machine Learning ◽

Detection Methods ◽

Hotspot Detection

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Litho-Aware Machine Learning for Hotspot Detection

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems ◽

10.1109/tcad.2017.2750068 ◽

2018 ◽

Vol 37 (7) ◽

pp. 1510-1514 ◽

Cited By ~ 6

Author(s):

Jea Woo Park ◽

Andres Torres ◽

Xiaoyu Song

Keyword(s):

Machine Learning ◽

Hotspot Detection

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Machine Learning Based Lithography Hotspot Detection with Sparse Feature Encoding and Hierarchical Pattern Classification

ECS Transactions ◽

10.1149/06001.1179ecst ◽

2014 ◽

Vol 60 (1) ◽

pp. 1179-1184 ◽

Cited By ~ 1

Author(s):

K. s. Luo ◽

Z. Shi ◽

Z. Geng

Keyword(s):

Machine Learning ◽

Pattern Classification ◽

Hotspot Detection ◽

Feature Encoding ◽

Hierarchical Pattern

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ADAPT: An Adaptive Machine Learning Framework with Application to Lithography Hotspot Detection

10.1109/mlcad52597.2021.9531210 ◽

2021 ◽

Author(s):

Mohamed Baker Alawieh ◽

David Z. Pan

Keyword(s):

Machine Learning ◽

Hotspot Detection ◽

Learning Framework

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High performance lithographic hotspot detection using hierarchically refined machine learning

16th Asia and South Pacific Design Automation Conference (ASP-DAC 2011) ◽

10.1109/aspdac.2011.5722294 ◽

2011 ◽

Cited By ~ 24

Author(s):

Duo Ding ◽

Andres J. Torres ◽

Fedor G. Pikus ◽

David Z. Pan

Keyword(s):

Machine Learning ◽

High Performance ◽

Hotspot Detection

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Hotspot detection using machine learning

2016 17th International Symposium on Quality Electronic Design (ISQED) ◽

10.1109/isqed.2016.7479235 ◽

2016 ◽

Cited By ~ 1

Author(s):

Kareem Madkour ◽

Sarah Mohamed ◽

Dina Tantawy ◽

Mohab Anis

Keyword(s):

Machine Learning ◽

Hotspot Detection

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Machine-learning-based hotspot detection using topological classification and critical feature extraction

Proceedings of the 50th Annual Design Automation Conference on - DAC '13 ◽

10.1145/2463209.2488816 ◽

2013 ◽

Cited By ~ 21

Author(s):

Yen-Ting Yu ◽

Geng-He Lin ◽

Iris Hui-Ru Jiang ◽

Charles Chiang

Keyword(s):

Machine Learning ◽

Feature Extraction ◽

Topological Classification ◽

Hotspot Detection ◽

Critical Feature

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Machine-Learning-Based Hotspot Detection Using Topological Classification and Critical Feature Extraction

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems ◽

10.1109/tcad.2014.2387858 ◽

2015 ◽

Vol 34 (3) ◽

pp. 460-470 ◽

Cited By ~ 37

Author(s):

Yen-Ting Yu ◽

Geng-He Lin ◽

Iris Hui-Ru Jiang ◽

Charles Chiang

Keyword(s):

Machine Learning ◽

Feature Extraction ◽

Topological Classification ◽

Hotspot Detection ◽

Critical Feature

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Machine learning based lithographic hotspot detection with critical-feature extraction and classification

2009 IEEE International Conference on IC Design and Technology ◽

10.1109/icicdt.2009.5166300 ◽

2009 ◽

Cited By ~ 23

Author(s):

Duo Ding ◽

Xiang Wu ◽

Joydeep Ghosh ◽

David Z. Pan

Keyword(s):

Machine Learning ◽

Feature Extraction ◽

Hotspot Detection ◽

Critical Feature

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Machine learning for mask/wafer hotspot detection and mask synthesis

Machine Learning using retarget data to improve accuracy of fast lithographic hotspot detection

Metrics for characterizing machine learning-based hotspot detection methods

Litho-Aware Machine Learning for Hotspot Detection

Machine Learning Based Lithography Hotspot Detection with Sparse Feature Encoding and Hierarchical Pattern Classification

ADAPT: An Adaptive Machine Learning Framework with Application to Lithography Hotspot Detection

High performance lithographic hotspot detection using hierarchically refined machine learning

Hotspot detection using machine learning

Machine-learning-based hotspot detection using topological classification and critical feature extraction

Machine-Learning-Based Hotspot Detection Using Topological Classification and Critical Feature Extraction

Machine learning based lithographic hotspot detection with critical-feature extraction and classification

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