Liquid target pulsed laser deposition and its applications to growing diamond/diamondlike carbon and gallium nitride thin films

1996 ◽  
Author(s):  
Rongfu Xiao ◽  
Z. F. Li ◽  
X. W. Sun ◽  
HoiSing Kwok
Keyword(s):  
Thin Films ◽  
Gallium Nitride ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Diamondlike Carbon

Influence of Post Growth Annealing on the Optical Properties of Gallium Nitride Films Grown by Pulsed Laser Deposition

2012 ◽  
Vol 1432 ◽  
Author(s):  
M. Baseer Haider ◽  
M. F. Al-Kuhaili ◽  
S. M. A. Durrani ◽  
Imran Bakhtiari
Keyword(s):  
Thin Films ◽  
Gallium Nitride ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Nitrogen Atmosphere ◽  
Laser Deposition ◽  
Optical Measurements ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force

Abstract:Gallium nitride thin films were grown by pulsed laser deposition. Subsequently, post-growth annealing of the samples was performed at 400, and 600 oC in the nitrogen atmosphere. Surface morphology of the as-grown and annealed samples was performed by atomic force microscopy, surface roughness of the films improved after annealing. Chemical analysis of the samples was performed using x-ray photon spectroscopy, stoichiometric Gallium nitride thin films were obtained for the samples annealed at 600 oC. Optical measurements of the samples were performed to investigate the effect of annealing on the band gap and optical constants the films.

Growth of gallium nitride thin films by liquid-target pulsed laser deposition

1997 ◽  
Vol 15 (4) ◽  
pp. 2207-2213 ◽  
Author(s):  
R. F. Xiao ◽  
X. W. Sun ◽  
Z. F. Li ◽  
N. Cue ◽  
H. S. Kwok ◽  
...  
Keyword(s):  
Thin Films ◽  
Gallium Nitride ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition

Pulsed laser deposition of aluminum nitride and gallium nitride thin films

1998 ◽  
Vol 127-129 ◽  
pp. 471-476 ◽  
Author(s):  
G.S Sudhir ◽  
H Fujii ◽  
W.S Wong ◽  
C Kisielowski ◽  
N Newman ◽  
...  
Keyword(s):  
Thin Films ◽  
Gallium Nitride ◽  
Aluminum Nitride ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition
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