Evaluating and correcting pattern variability induced by OPC within regular array layout
1980 ◽
Vol 38
◽
pp. 376-377
Keyword(s):
Keyword(s):
1985 ◽
Vol 144
(2)
◽
pp. 365-369
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Keyword(s):
2007 ◽
Vol 17
(03)
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pp. 953-963
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Keyword(s):
2021 ◽
Vol 17
(1)
◽
pp. 287-292