Quad target method: optical simulation to model the step height and projected fringe frequency

Author(s):  
Matthew E. L. Jungwirth ◽  
Sam Schmidt ◽  
Justin Sapp
1984 ◽  
Author(s):  
J. L. Forgham ◽  
H. D. McIntire
Keyword(s):  

2003 ◽  
Author(s):  
Alfred B. Schultz ◽  
Richard G. Lyon ◽  
Mark Kochte ◽  
Dorothy A. Fraquelli ◽  
Frederick Bruhweiler ◽  
...  

2020 ◽  
Vol 102 (5) ◽  
Author(s):  
B. Jaramillo-Ávila ◽  
F. H. Maldonado-Villamizar ◽  
B. M. Rodríguez-Lara
Keyword(s):  

Wear ◽  
2010 ◽  
Vol 268 (3-4) ◽  
pp. 505-510 ◽  
Author(s):  
Ji Chul Yang ◽  
Dong Won Oh ◽  
Gae Won Lee ◽  
Chang Lyung Song ◽  
Taesung Kim

2010 ◽  
Vol 61 (2) ◽  
pp. 415-420 ◽  
Author(s):  
Sanjib Moulick ◽  
Naresh V. Tambada ◽  
Basant K. Singh ◽  
B. C. Mal

Aeration experiments, maintaining nappe flow conditions, were carried out on a rectangular stepped cascade of total height 3.0 m to determine the total number of steps, slope of the entire cascade and hydraulic loading rate at which maximum overall aeration efficiency occurs, keeping the surface area of individual steps constant. Based on dimensional analysis, the overall aeration efficiency at standard conditions (E20) was expressed as a function of square of total number of steps (N2) and dimensionless discharge (dc/h), where dc and h represent critical depth in a rectangular prismatic channel and individual step height respectively. An empirical equation with E20 as the response and N2 and dc/h as the independent parameters was developed based on the experimental results subject to 36 ≤ N2 ≤ 196 and 0.009 ≤ dc/h ≤ 0.144. The experimental results showed that the overall aeration efficiency (E20) for a particular step height of stepped cascade increases with increase in dc/h up to a certain value and then decreases. This may be due to at higher dc/h, i.e., at higher hydraulic loading rate, the flow approaches the transition zone and thereby aeration efficiency decreases. E20 was also found to increase with number of steps at any hydraulic loading rate, because of the increased surface area of fall. The optimum number of steps, slope of the entire stepped cascade and hydraulic loading rate were found to be 14, 0.351 and 0.009 m2/s respectively producing the maximum value of overall aeration efficiency of 0.90.


2013 ◽  
Vol 634-638 ◽  
pp. 2949-2954
Author(s):  
Xin Liang Tang ◽  
Yu Ling Liu ◽  
Hong Yuan Zhang ◽  
Jie Bao

Silica abrasive plays an important role in chemical mechanical planarization (CMP) of copper. In this paper, effect of different silica abrasive concentrations on copper removal rate and planarization performance of copper was investigated. The results show that the copper removal rate was increased as the concentration of silica abrasive increase. However, excessive abrasive will lead to a decreased copper removal rate. The initial step height values of the multilayer copper wafers were all about 2500Å, and after being polished for 30s, the remaining values of step height of slurry A, B, C and D were 717 Å, 906 Å, 1222 Å and 1493 Å. It indicates that alkaline copper slurries with different abrasive concentrations all had a good planarization performance on copper patterned wafer CMP. As the abrasive concentration increased, the planarization capability was enhanced.


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