Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C)
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2011 ◽
Vol 131
(5)
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pp. 178-184
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2012 ◽
Vol 132
(9)
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pp. 261-268
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1988 ◽
Vol 18
(6)
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pp. 746-753
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2009 ◽
Vol 24
(12)
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pp. 125008
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2017 ◽
Vol 25
(2)
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pp. 353-364
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2002 ◽
Vol 307-311
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pp. 681-685
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