Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

2004 ◽  
Author(s):  
Chi-Yuan Lee ◽  
Tsung-Tsong Wu ◽  
Yung-Yu Chen ◽  
Ying-Chou Cheng ◽  
Wen-Jong Chen ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Surface Acoustic Wave ◽  
Wet Etching ◽  
Silicon Membrane ◽  
Real Time Monitoring ◽  
Acoustic Wave Sensor

scholarly journals In SituMonitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor

2004 ◽  
Vol 43 (6A) ◽  
pp. 3611-3617 ◽  
Author(s):  
Chi-Yuan Lee ◽  
Ying-Chou Cheng ◽  
Yung-Yu Chen ◽  
Pei-Zen Chang ◽  
Tsung-Tsong Wu ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wet Etching ◽  
Membrane Thickness ◽  
Silicon Membrane ◽  
Acoustic Wave Sensor

A Novel Surface Acoustic Wave Biosensor for Real-Time Monitoring of Cell Contractile Properties

2020 ◽  
Vol MA2020-01 (27) ◽  
pp. 1970-1970
Author(s):  
Xinwei Wei ◽  
Junyu Zhang ◽  
Liujing Zhuang ◽  
Hao Wan ◽  
Ping Wang
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Surface Acoustic Wave ◽  
Contractile Properties ◽  
Real Time Monitoring ◽  
Acoustic Wave Biosensor

Selective real-time measurement of styrene vapor using a surface-acoustic-wave sensor with a regenerable organoplatinum coating

1990 ◽  
Vol 62 (13) ◽  
pp. 1227-1232 ◽  
Author(s):  
Edward T. Zellers ◽  
Noralynn. Hassold ◽  
Richard M. White ◽  
Stephen M. Rappaport
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Surface Acoustic Wave ◽  
Time Measurement ◽  
Real Time Measurement ◽  
Acoustic Wave Sensor
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