Coated surface acoustic wave sensor employing a reversible mass-amplifying ligand substitution reaction for real-time measurement of 1,3-butadiene at low- and sub-ppm concentrations

1993 ◽  
Vol 65 (10) ◽  
pp. 1340-1349 ◽  
Author(s):  
Guo Zheng. Zhang ◽  
Edward T. Zellers
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Surface Acoustic Wave ◽  
Substitution Reaction ◽  
Ligand Substitution ◽  
Time Measurement ◽  
Real Time Measurement ◽  
Acoustic Wave Sensor ◽  
Coated Surface ◽  
Ligand Substitution Reaction

Selective real-time measurement of styrene vapor using a surface-acoustic-wave sensor with a regenerable organoplatinum coating

1990 ◽  
Vol 62 (13) ◽  
pp. 1227-1232 ◽  
Author(s):  
Edward T. Zellers ◽  
Noralynn. Hassold ◽  
Richard M. White ◽  
Stephen M. Rappaport
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Surface Acoustic Wave ◽  
Time Measurement ◽  
Real Time Measurement ◽  
Acoustic Wave Sensor

Optimal Coating Selection for the Analysis of Organic Vapor Mixtures with Polymer-Coated Surface Acoustic Wave Sensor Arrays

1995 ◽  
Vol 67 (6) ◽  
pp. 1092-1106 ◽  
Author(s):  
Edward T. Zellers ◽  
Stuart A. Batterman ◽  
Mingwei. Han ◽  
Samuel J. Patrash
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Sensor Arrays ◽  
Organic Vapor ◽  
Acoustic Wave Sensor ◽  
Coated Surface ◽  
Selection For ◽  
Vapor Mixtures

Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

2004 ◽  
Author(s):  
Chi-Yuan Lee ◽  
Tsung-Tsong Wu ◽  
Yung-Yu Chen ◽  
Ying-Chou Cheng ◽  
Wen-Jong Chen ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Surface Acoustic Wave ◽  
Wet Etching ◽  
Silicon Membrane ◽  
Real Time Monitoring ◽  
Acoustic Wave Sensor
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