Role of laser pulse duration and ambient nitrogen pressure in deposition of AlN thin films
2000 ◽
Vol 154-155
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pp. 467-472
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Keyword(s):
2015 ◽
Vol 49
(3)
◽
pp. 035301
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2011 ◽
Vol 13
(6)
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pp. 2378-2386
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Keyword(s):
2006 ◽
Vol 430
(4-6)
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pp. 443-447
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1983 ◽
Vol 44
(11)
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pp. 1247-1255
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