A study of damage mechanisms during EUV mask substrate cleaning

Author(s):  
Abbas Rastegar ◽  
Sean Eichenalub ◽  
Kurt Goncher ◽  
Pat Marmillion
Alloy Digest ◽  
2013 ◽  
Vol 62 (10) ◽  

Abstract Böhler (or Boehler) W405 is a hot work steel with a great combination of hardness, strength, toughness, ductility, and thermal conductivity to resist typical damage mechanisms in applications. This datasheet provides information on composition, physical properties, and elasticity. It also includes information on forming and heat treating. Filing Code: TS-722. Producer or source: Böhler-Uddeholm North America.


2009 ◽  
Vol 13 (9) ◽  
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Pierre Argoul ◽  
Francesco Freddi ◽  
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Thi Hoa Tam Nguyen

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