Development of a short pulse and high average power CO 2 laser for EUV lithography

2006 ◽  
Author(s):  
Tatsuya Ariga
Keyword(s):  
Short Pulse ◽  
Average Power ◽  
High Average Power ◽  
Euv Lithography

High Repetition and High Average Power Nd:YAG Laser for EUV Lithography

2008 ◽  
Author(s):  
Hisanori Fujita ◽  
Masahiro Nakatsuka ◽  
Ravi Bhushan ◽  
Koji Tsubakimoto ◽  
Hidetsugu Yoshida ◽  
...  
Keyword(s):  
Nd:Yag Laser ◽  
Average Power ◽  
High Average Power ◽  
High Repetition ◽  
Euv Lithography

High average power short-pulse generation from singlemode InGaAs/GaAs laser diodes

1999 ◽  
Vol 146 (1) ◽  
pp. 51-54 ◽  
Author(s):  
E.U. Rafailov ◽  
W. Sibbett ◽  
D.J.L. Birkin ◽  
W.E. Sleat ◽  
E.A. Avrutin
Keyword(s):  
Short Pulse ◽  
Laser Diodes ◽  
Average Power ◽  
Pulse Generation ◽  
High Average Power ◽  
Short Pulse Generation ◽  
Gaas Laser

scholarly journals The Application of Cryogenic Laser Physics to the Development of High Average Power Ultra-Short Pulse Lasers

2016 ◽  
Vol 6 (1) ◽  
pp. 23 ◽  
Author(s):  
David Brown ◽  
Sten Tornegård ◽  
Joseph Kolis ◽  
Colin McMillen ◽  
Cheryl Moore ◽  
...  
Keyword(s):  
Laser Physics ◽  
Short Pulse ◽  
Average Power ◽  
High Average Power ◽  
Short Pulse Lasers ◽  
Ultra Short Pulse

Mode-locked Erbium-doped Fiber Laser with High Average Power and Ultra-short Pulse Duration

2018 ◽  
Author(s):  
Victor Bock ◽  
Marco Plötner ◽  
Till Walbaum ◽  
Thomas Schreiber ◽  
Ramona Eberhardt ◽  
...  
Keyword(s):  
Fiber Laser ◽  
Pulse Duration ◽  
Short Pulse ◽  
Average Power ◽  
High Average Power ◽  
Short Pulse Duration ◽  
Erbium Doped ◽  
Ultra Short Pulse

High Average Power and High Repetition Solid State Laser for EUV Lithography

2007 ◽  
Author(s):  
Hisanori Fujita ◽  
Masahiro Nakatsuka ◽  
Ravi Bhushan ◽  
Kouji Tsubakimoto ◽  
Hidetsugu Yoshida ◽  
...  
Keyword(s):  
Solid State ◽  
Average Power ◽  
Solid State Laser ◽  
High Average Power ◽  
State Laser ◽  
High Repetition ◽  
Euv Lithography
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