A novel electromagnetically actuated MEMS scanning mirror integrated with rotation angle sensor

Mapping Intimacies ◽

10.1117/12.901043 ◽

2011 ◽

Author(s):

Li Chen ◽

Zhi-yu Wen ◽

Zhong-quan Wen ◽

Rong-rong Qian

Keyword(s):

Rotation Angle ◽

Angle Sensor ◽

Scanning Mirror ◽

Electromagnetically Actuated

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A novel electromagnetically actuated resonant MEMS scanning mirror with large deflection

2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2008.4484404 ◽

2008 ◽

Author(s):

Canjun Mu ◽

Feiling Zhang ◽

Liang Lu ◽

Yaming Wu

Keyword(s):

Large Deflection ◽

Scanning Mirror ◽

Electromagnetically Actuated

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A fan-type variable capacitor rotation angle sensor for university physics experiments

Physics Education ◽

10.1088/1361-6552/ab6c3f ◽

2020 ◽

Vol 55 (3) ◽

pp. 035004

Author(s):

Takuo Sakon ◽

Kaname Inoguchi

Keyword(s):

Rotation Angle ◽

Angle Sensor ◽

Variable Capacitor ◽

University Physics ◽

Type Variable ◽

Physics Experiments

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Micromirror integrated with piezorestive rotation angle sensor for measuring small signal

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. ◽

10.1109/omems.2006.1708265 ◽

2006 ◽

Author(s):

M. Tabata ◽

M. Sasaki ◽

K. Hane

Keyword(s):

Rotation Angle ◽

Small Signal ◽

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Characteristics and Improved Design of Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.04c191 ◽

2009 ◽

Vol 48 (4) ◽

pp. 04C191 ◽

Author(s):

Takuro Aonuma ◽

Shinya Kumagai ◽

Minoru Sasaki ◽

Motoki Tabata ◽

Kazuhiro Hane

Keyword(s):

Rotation Angle ◽

Angle Sensor ◽

Improved Design

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Extraction method for a wheel rotation average of longitudinal creep force from strain data acquired by instrumented wheelset without the use of rotation angle sensor

Transactions of the JSME (in Japanese) ◽

10.1299/transjsme.20-00237 ◽

2021 ◽

Vol 87 (894) ◽

pp. 20-00237-20-00237

Author(s):

Takatoshi HONDO

Keyword(s):

Extraction Method ◽

Rotation Angle ◽

Angle Sensor ◽

Wheel Rotation ◽

Strain Data ◽

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The Basic Examination of the Magnetic Rotation Angle Sensor with the Magnetic Substance Slit

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.140.306 ◽

2020 ◽

Vol 140 (6) ◽

pp. 306-311

Author(s):

Takeshi Musha ◽

Hiroshi Inujima

Keyword(s):

Rotation Angle ◽

Magnetic Rotation ◽

Angle Sensor ◽

Basic Examination

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Micro-Rotation Angle Sensor with Integrated Hall IC

Advanced Microsystems for Automotive Applications 2008 - VDI-Buch ◽

10.1007/978-3-540-77980-3_18 ◽

2008 ◽

pp. 229-237

Author(s):

Toshikazu Ina ◽

Kenji Takeda ◽

Akihiko Sawada ◽

Shigetoshi Hukaya

Keyword(s):

Rotation Angle ◽

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Fiber-optic rotation angle sensor based on fused fiber coupler

Journal of Sensor Science and Technology ◽

10.5369/jsst.2010.19.1.062 ◽

2010 ◽

Vol 19 (1) ◽

pp. 62-66

Author(s):

Kwang-Taek Kim ◽

Kyu-Jung Cho

Keyword(s):

Fiber Optic ◽

Rotation Angle ◽

Angle Sensor ◽

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Optical system of rotation angle sensor based on BR-180 ° prism and photoelectric autocollimator

Оптический журнал ◽

10.17586/1023-5086-2019-86-03-72-77 ◽

2019 ◽

Keyword(s):

Optical System ◽

Rotation Angle ◽

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The Basic Examination of the Magnetic Shielding Structure to Use for a Magnetic Rotation Angle Sensor

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.138.570 ◽

2018 ◽

Vol 138 (11) ◽

pp. 570-575 ◽

Author(s):

Takeshi Musha ◽

Hiroshi Inujima

Keyword(s):

Rotation Angle ◽

Magnetic Shielding ◽

Magnetic Rotation ◽

Angle Sensor ◽

Basic Examination

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