Optical system of rotation angle sensor based on BR-180 ° prism and photoelectric autocollimator

2019 ◽  
Keyword(s):  
Optical System ◽  
Rotation Angle ◽  
Angle Sensor

A simple optical system for measuring small rotation angle of mechanism

2010 ◽  
Author(s):  
Weijun Li ◽  
Qinwei Ma ◽  
Dongwei Li ◽  
Siyang Liu ◽  
Chen Yuan
Keyword(s):  
Optical System ◽  
Rotation Angle ◽  
Small Rotation

Characteristics and Improved Design of Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device

2009 ◽  
Vol 48 (4) ◽  
pp. 04C191 ◽  
Author(s):  
Takuro Aonuma ◽  
Shinya Kumagai ◽  
Minoru Sasaki ◽  
Motoki Tabata ◽  
Kazuhiro Hane
Keyword(s):  
Rotation Angle ◽  
Angle Sensor ◽  
Improved Design

Micro-Rotation Angle Sensor with Integrated Hall IC

2008 ◽  
pp. 229-237
Author(s):  
Toshikazu Ina ◽  
Kenji Takeda ◽  
Akihiko Sawada ◽  
Shigetoshi Hukaya
Keyword(s):  
Rotation Angle ◽  
Angle Sensor

Theoretical Study on Self-Calibration for the Wide-Range Laser Auto-Collimation Method

2008 ◽  
Vol 381-382 ◽  
pp. 271-274
Author(s):  
Hiroki Shimizu ◽  
Osamu Hayashi
Keyword(s):  
Optical System ◽  
Calibration Method ◽  
Calibration Procedure ◽  
Measurement Range ◽  
Angle Sensor ◽  
Specific Calculation ◽  
Self Calibration ◽  
Wide Range ◽  
Before And After ◽  
Steep Slopes

A wide-range laser auto-collimation method to measure the surface profiles of targets with steep slopes has been proposed. This method employs a deflecting optical system to enlarge the measurement range of the angle sensor. However, this optical system also changes the sensitivity property of the angle sensor. Therefore, we propose a new in-situ self-calibration method that includes the geometrical designed data of the target and can be applied to wide-range laser auto-collimation method. In the proposed method, the calibration sensitivities at each measurement point are obtained with two sets of measured data, which are acquired before and after performing minute rotation or translation with respect to the measured target, and the simulated shift of the normal angle at each point. The present paper describes the calibration procedure and specific calculation method used in the proposed method.

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