J. Alexander Liddle: Metrology at the nanoscale key to understanding of next generation lithography processes
2009 ◽
Vol 129
(3)
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pp. 393-398
2000 ◽
Vol 18
(4)
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pp. 1119-1124
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2002 ◽
Vol 38
(1)
◽
pp. 95-100
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2007 ◽
Vol 43
(03)
◽
pp. 1
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