Electrostatics demonstrations at high relative humidity

1984 ◽  
Vol 52 (1) ◽  
pp. 86-86 ◽  
Author(s):  
William Lichten ◽  
Paul McGrath
2014 ◽  
Vol 42 (8) ◽  
pp. 879-884 ◽  
Author(s):  
Rosa López-Gigosos ◽  
Alberto Mariscal ◽  
Mario Gutierrez-Bedmar ◽  
Eloisa Mariscal-Lopez ◽  
Joaquín Fernández-Crehuet

1973 ◽  
Vol 10 (5) ◽  
pp. 292-300 ◽  
Author(s):  
Mitsuo NARITOMI ◽  
Yoshikazu YOSHIDA ◽  
Seiji FUKUDA

2012 ◽  
Vol 28 (1) ◽  
pp. 670-679 ◽  
Author(s):  
Abdulrahman Alhozaimy ◽  
Raja Rizwan Hussain ◽  
Rajeh Al-Zaid ◽  
Abdulaziz Al-Negheimish

2000 ◽  
Author(s):  
Herbert R. Shea ◽  
Carolyn D. White ◽  
Arman Gasparyan ◽  
Robert B. Comizzoli ◽  
Susanne Arney

Abstract We present a study of the anodic oxidation of MEMS poly-Silicon electrodes and wires in ambients with high relative humidity and high voltages. MEMS poly-Si electrodes that are hermetically packaged in dry ambients show no signs of degradation on a time scale of years even when operated at hundreds of volts. To accelerate electrical failure modes, we expose unpackaged chips to ambients with high relative humidity. We then observe anodic oxidation of the most positively biased poly-Si structures on a time scale of minutes or hours. We describe this anodic oxidation as a function of relative humidity and voltage, and its dependence on surface leakage currents.


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