Determination of impurity elements in high-purity solid precursors based on tantalum pentoxide by inductively coupled plasma mass spectrometry
2014 ◽
Vol 69
(6)
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pp. 598-607
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1995 ◽
Vol 10
(10)
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pp. 849-852
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1997 ◽
Vol 12
(9)
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pp. 1083-1086
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1998 ◽
Vol 369
(1-2)
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pp. 79-85
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