Physical vacuum deposition, sputtering
2020 ◽
Vol 1534
◽
pp. 012004
2017 ◽
Vol 240
◽
pp. 37-45
◽
Keyword(s):
2000 ◽
Vol 170
(3)
◽
pp. 351
◽
2015 ◽
Vol 37
(0)
◽
pp. 89-97