Studies of Defect Detection and Thermal Influence in Semi-Insulating 6H-SiC Substrates Using a Long-Wavelength Infrared Thermal Imaging Camera

2010 ◽  
Vol 3 (8) ◽  
pp. 085501
Author(s):  
Passapong Wutimakun ◽  
Kunyong Lee ◽  
Hisashi Miyazaki ◽  
Jun Morimoto
Keyword(s):  
Defect Detection ◽  
Thermal Imaging ◽  
Infrared Thermal Imaging ◽  
Thermal Imaging Camera ◽  
Long Wavelength ◽  
Imaging Camera ◽  
Thermal Influence ◽  
Long Wavelength Infrared

Characterization of Defects in Semi-Insulating 6H-SiC Substrates Using IR Thermal Imaging Camera

2010 ◽  
Vol 645-648 ◽  
pp. 559-562 ◽  
Author(s):  
Kun Yong Lee ◽  
Hisashi Miyazaki ◽  
Yoichi Okamoto ◽  
Jun Morimoto
Keyword(s):  
Thermal Imaging ◽  
Infrared Thermal Imaging ◽  
Ir Camera ◽  
Thermal Imaging Camera ◽  
Long Wavelength ◽  
Macro Scale ◽  
Imaging Camera ◽  
Thermal Influence ◽  
Scale 8 ◽  
Non Destructive

We have detected defects micro-pipes and a cluster of impurities in semi-insulating 6H-SiC substrates using long-wavelength infrared thermal imaging camera (IR-camera) with 8 ~ 14 µm in non-destructive and non-contact. Also we have evaluated the thermal influence of defects on the entire substrates from the observation results of scanning laser microscope (SLM) and light scattering tomography (LST). Through the process, it was certificated that the defects in the substrates could be detected with relatively macroscopic scale (8  6 mm2). Moreover, through a temperature profile processing by a 0.1 K thermal resolution, we estimated thermal behavior of the defect areas in the 6H-SiC precisely. The IR-camera is considered as effective technique for evaluating the defects in the intermediate range between micro and macro scale.

New infrared thermal imaging camera diagnostic

1997 ◽  
Vol 68 (1) ◽  
pp. 971-973 ◽  
Author(s):  
M. Ciotti ◽  
C. Alessandrini ◽  
A. De Angelis ◽  
V. Vitale ◽  
S. Bernd ◽  
...  
Keyword(s):  
Thermal Imaging ◽  
Infrared Thermal Imaging ◽  
Thermal Imaging Camera ◽  
Imaging Camera

scholarly journals Development of Calibration Target for Infrared Thermal Imaging Camera

2014 ◽  
Vol 34 (3) ◽  
pp. 248-253 ◽  
Author(s):  
Su Un Kim ◽  
Man Yong Choi ◽  
Jeong Hak Park ◽  
Kwang Yong Shin ◽  
Eui Chul Lee
Keyword(s):  
Thermal Imaging ◽  
Calibration Target ◽  
Infrared Thermal Imaging ◽  
Thermal Imaging Camera ◽  
Imaging Camera
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