Preparation of (Bi, Pb)-Sr-Ca-Cu-O Superconducting Thin Films by the Mist Microwave-Plasma Chemical Vapor Deposition Method

1993 ◽  
Vol 32 (Part 2, No. 11B) ◽  
pp. L1648-L1650 ◽  
Author(s):  
Naoyuki Takahashi ◽  
Daigorou Kanematsu ◽  
Akinori Koukitu ◽  
Hisashi Seki ◽  
Yasuharu Kamioka
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Chemical Vapor Deposition Method ◽  
Superconducting Thin Films ◽  
Deposition Method ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition
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