Electron-Stimulated Desorption and in situ Scanning Electron Microscopy Study on Self-Developing Reaction of High-Resolution Inorganic Electron Beam Resist

1995 ◽  
Vol 34 (Part 2, No. 7B) ◽  
pp. L948-L950
Author(s):  
Heiji Watanabe ◽  
Jun-ichi Fujita ◽  
YukinoriOchiai ◽  
Shinji Matsui ◽  
MasakazuIchikawa
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Electron Beam ◽  
High Resolution ◽  
Microscopy Study ◽  
Electron Microscopy Study ◽  
Scanning Electron Microscopy Study ◽  
Electron Stimulated Desorption ◽  
Scanning Electron

scholarly journals Low kV High Resolution Scanning Electron Microscopy Study of Si Nanowire Surfaces

2015 ◽  
Vol 21 (S3) ◽  
pp. 1261-1262
Author(s):  
C. Alfonso ◽  
L. Roussel ◽  
A. Charai ◽  
C. Dominici ◽  
A. P. C. Campos ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
High Resolution ◽  
Microscopy Study ◽  
Electron Microscopy Study ◽  
Si Nanowire ◽  
Scanning Electron Microscopy Study ◽  
Scanning Electron
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