Low Temperature Deposition of(Ba,Sr)TiO3Films by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition

1996 ◽  
Vol 35 (Part 1, No. 9B) ◽  
pp. 5089-5093 ◽  
Author(s):  
Shuji Sone ◽  
Hisato Yabuta ◽  
Yoshitake Kato ◽  
Toshihiro Iizuka ◽  
Shintaro Yamamichi ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Temperature Deposition ◽  
Resonance Plasma
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