chemical vapor deposition reactor
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scholarly journals Design of a Silicon Carbide Chemical Vapor Deposition Reactor Cleaning Process Using Chlorine Trifluoride Gas Accounting for Exothermic Reaction Heat

2020 ◽  
Vol 9 (10) ◽  
pp. 104008
Author(s):  
Masaya Hayashi ◽  
Takumi Mamyouda ◽  
Hitoshi Habuka ◽  
Akio Ishiguro ◽  
Shigeaki Ishii ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Exothermic Reaction ◽  
Chemical Vapor ◽  
Cleaning Process ◽  
Reaction Heat ◽  
Chemical Vapor Deposition Reactor

Local heat and mass transfer characteristics of different channel configurations in polysilicon chemical vapor deposition reactor

Solar Energy ◽  
2020 ◽  
Vol 196 ◽  
pp. 494-504
Author(s):  
Lisha An ◽  
Ting Zhang ◽  
Xiangshu Lei ◽  
Peng Yang ◽  
Yingwen Liu
Keyword(s):  
Mass Transfer ◽  
Chemical Vapor Deposition ◽  
Heat And Mass Transfer ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Local Heat ◽  
Chemical Vapor Deposition Reactor ◽  
Transfer Characteristics
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