chemical vapor deposition reactor Recently Published Documents

Vapor Deposition ◽

Chemical Vapor ◽

Dynamics Modeling ◽

Computational Fluid Dynamics Modeling ◽

Pressure Chemical

Design of a Silicon Carbide Chemical Vapor Deposition Reactor Cleaning Process Using Chlorine Trifluoride Gas Accounting for Exothermic Reaction Heat

ECS Journal of Solid State Science and Technology ◽

10.1149/2162-8777/abc3cf ◽

2020 ◽

Vol 9 (10) ◽

pp. 104008

Author(s):

Masaya Hayashi ◽

Takumi Mamyouda ◽

Hitoshi Habuka ◽

Akio Ishiguro ◽

Shigeaki Ishii ◽

...

Keyword(s):

Silicon Carbide ◽

Vapor Deposition ◽

Exothermic Reaction ◽

Chemical Vapor ◽

Cleaning Process ◽

Reaction Heat ◽

Vapor deposition polymerization of synthetic rubber thin film in a plasma enhanced chemical vapor deposition reactor

Journal of Applied Polymer Science ◽

10.1002/app.49722 ◽

2020 ◽

Vol 138 (4) ◽

pp. 49722

Author(s):

Mehmet Gürsoy

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Chemical Vapor ◽

Synthetic Rubber

Heat and mass transfer characteristics of three-dimensional bell-shaped polysilicon chemical vapor deposition reactor

Journal of Thermal Analysis and Calorimetry ◽

10.1007/s10973-020-09465-6 ◽

2020 ◽

Vol 141 (1) ◽

pp. 323-335

Author(s):

Lisha An ◽

Xiangshu Lei ◽

Xin Qi ◽

Ming Fang ◽

Yingwen Liu

Keyword(s):

Mass Transfer ◽

Heat And Mass Transfer ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

Transfer Characteristics

Quartz crystal microbalance for real-time monitoring chlorosilane gas transport in slim vertical cold wall chemical vapor deposition reactor

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2019.104759 ◽

2020 ◽

Vol 106 ◽

pp. 104759

Author(s):

Toshinori Takahashi ◽

Mana Otani ◽

Mitsuko Muroi ◽

Kenta Irikura ◽

Miya Matsuo ◽

...

Keyword(s):

Real Time ◽

Quartz Crystal Microbalance ◽

Vapor Deposition ◽

Quartz Crystal ◽

Gas Transport ◽

Chemical Vapor ◽

Cold Wall ◽

Real Time Monitoring ◽

DEVELOPMENT OF PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION REACTOR FOR PREPARATION OF OXYGEN CONTAINING ORGANOSILAZANE POLYMER THIN FILMS

NANOCON 2019 Conference Proeedings ◽

10.37904/nanocon.2019.8749 ◽

2020 ◽

Author(s):

Roman PŘIBYL ◽

Štěpánka KELAROVÁ ◽

Vojtěch HOMOLA ◽

Vilma BURŠÍKOVÁ

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Polymer Thin Films ◽

Chemical Vapor ◽

Local heat and mass transfer characteristics of different channel configurations in polysilicon chemical vapor deposition reactor

Solar Energy ◽

10.1016/j.solener.2019.12.059 ◽

2020 ◽

Vol 196 ◽

pp. 494-504

Author(s):

Lisha An ◽

Ting Zhang ◽

Xiangshu Lei ◽

Peng Yang ◽

Yingwen Liu

Keyword(s):

Mass Transfer ◽

Heat And Mass Transfer ◽

Vapor Deposition ◽

Chemical Vapor ◽

Local Heat ◽

Transfer Characteristics

Quartz Crystal Microbalances for Evaluating Gas Motion Differences between Dichlorosilane and Trichlorosilane in Ambient Hydrogen in a Slim Vertical Cold Wall Chemical Vapor Deposition Reactor

Advances in Chemical Engineering and Science ◽

10.4236/aces.2020.103014 ◽

2020 ◽

Vol 10 (03) ◽

pp. 190-200 ◽

Cited By ~ 1

Author(s):

Mana Otani ◽

Toshinori Takahashi ◽

Hitoshi Habuka ◽

Yuuki Ishida ◽

Shin-Ichi Ikeda ◽

...

Keyword(s):

Vapor Deposition ◽

Quartz Crystal ◽

Chemical Vapor ◽

Cold Wall ◽

Quartz Crystal Microbalances

Study of microwave discharge at high power density conditions in diamond chemical vapor deposition reactor by optical emission spectroscopy

Diamond and Related Materials ◽

10.1016/j.diamond.2019.04.030 ◽

2019 ◽

Vol 97 ◽

pp. 107407 ◽

Cited By ~ 4

Author(s):

S.A. Bogdanov ◽

A.M. Gorbachev ◽

A.L. Vikharev ◽

D.B. Radishev ◽

M.A. Lobaev

Keyword(s):

Vapor Deposition ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Microwave Discharge ◽

Chemical Vapor ◽

Optical Emission ◽

High Power Density ◽

Diamond Chemical Vapor Deposition

Optimization of operating parameters in polysilicon chemical vapor deposition reactor with response surface methodology

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2018.02.030 ◽

2018 ◽

Vol 489 ◽

pp. 11-19 ◽

Cited By ~ 5

Author(s):

Li-sha An ◽

Chun-jiao Liu ◽

Ying-wen Liu

Keyword(s):

Response Surface Methodology ◽

Response Surface ◽

Vapor Deposition ◽

Chemical Vapor ◽

Operating Parameters ◽