Propagation Characteristics of Surface Acoustic Waves inKNbO3/SrTiO3/SiLayered Structures

1997 ◽  
Vol 36 (Part 1, No. 4A) ◽  
pp. 2192-2195 ◽  
Author(s):  
Mu-Shiang Wu ◽  
Wen-Ching Shih
Author(s):  
Masashi Suzuki ◽  
Shoji Kakio

Abstract Piezoelectricity of YbAlN films has recently been shown to be almost as high as that of ScAlN films. YbAlN film surface acoustic wave (SAW) resonators are expected to have a high coupling factor. We theoretically investigated the propagation characteristics of first-mode Rayleigh SAWs (RSAWs) on Yb0.33Al0.67N film/high-velocity Si, sapphire, AlN, SiC, BN, and diamond substrates. The first-mode RSAWs on the YbAlN layered structures had high coupling factors, higher than those on ScAlN layered structures. An enhancement of the effective coupling factor of the first mode RSAWs was observed in polarity inverted YbAlN film/BN or diamond substrate structures.


1993 ◽  
Vol 32 (Part 1, No. 5B) ◽  
pp. 2333-2336 ◽  
Author(s):  
Kiyoshi Nakamura ◽  
Toshiaki Hanaoka

2005 ◽  
Vol 44 (6B) ◽  
pp. 4539-4543 ◽  
Author(s):  
Koji Hasegawa ◽  
Yuki Ikeda ◽  
Hiroshi Okano

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