Real-Time Monitoring and Control of Plasma Etching

Moshe Sarfaty; Chris Baum; Michael Harper; Noah Hershkowitz; Juda L. Shohet

doi:10.1143/jjap.37.2381

Real-Time Monitoring and Control of Plasma Etching

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.2381 ◽

1998 ◽

Vol 37 (Part 1, No. 4B) ◽

pp. 2381-2387 ◽

Cited By ~ 10

Author(s):

Moshe Sarfaty ◽

Chris Baum ◽

Michael Harper ◽

Noah Hershkowitz ◽

Juda L. Shohet

Keyword(s):

Real Time ◽

Plasma Etching ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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Development of Techniques for Real‐Time Monitoring and Control in Plasma Etching: I . Response Surface Modeling of and Etching of Silicon and Silicon Dioxide

Journal of The Electrochemical Society ◽

10.1149/1.2085677 ◽

1991 ◽

Vol 138 (3) ◽

pp. 789-799 ◽

Cited By ~ 19

Author(s):

K. J. McLaughlin ◽

S. W. Butler ◽

T. F. Edgar ◽

I. Trachtenberg

Keyword(s):

Silicon Dioxide ◽

Response Surface ◽

Real Time ◽

Plasma Etching ◽

Surface Modeling ◽

Response Surface Modeling ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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Real-time monitoring and control of plasma etching

10.1117/12.48930 ◽

1991 ◽

Author(s):

Stephanie W. Butler ◽

Kevin J. McLaughlin ◽

Thomas F. Edgar ◽

Isaac Trachtenberg

Keyword(s):

Real Time ◽

Plasma Etching ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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Real-time monitoring and control in plasma etching

IEEE Control Systems Magazine ◽

10.1109/37.75572 ◽

1991 ◽

Vol 11 (3) ◽

pp. 3-10 ◽

Cited By ~ 18

Keyword(s):

Real Time ◽

Plasma Etching ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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Development of Techniques for Real-Time Monitoring and Control in Plasma Etching

10.23919/acc.1990.4790708 ◽

1990 ◽

Cited By ~ 2

Author(s):

K. J. McLaughlin ◽

T. F. Edgar ◽

I. Trachtenberg

Keyword(s):

Real Time ◽

Plasma Etching ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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Development of Techniques for Real‐Time Monitoring and Control in Plasma Etching: II . Multivariable Control System Analysis of Manipulated, Measured, and Performance Variables

Journal of The Electrochemical Society ◽

10.1149/1.2086044 ◽

1991 ◽

Vol 138 (9) ◽

pp. 2727-2735 ◽

Cited By ~ 34

Author(s):

S. W. Butler ◽

K. J. McLaughlin ◽

T. F. Edgar ◽

I. Trachtenberg

Keyword(s):

Control System ◽

Real Time ◽

Plasma Etching ◽

System Analysis ◽

Multivariable Control ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Performance Variables ◽

And Performance ◽

And Control

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Implementation of 802.15.4 Wireless Sensor Network in Real-time Monitoring and Control System for Green House

International Journal of Urban Design for Ubiquitous Computing ◽

10.21742/ijuduc.2015.3.2.02 ◽

2015 ◽

Vol 3 (2) ◽

pp. 9-22

Author(s):

Jaypal Baviskar ◽

◽

Afshan Mulla ◽

Amol Baviskar ◽

Jeet Desai ◽

...

Keyword(s):

Control System ◽

Wireless Sensor Network ◽

Real Time ◽

Sensor Network ◽

Wireless Sensor ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Monitoring And Control System ◽

Green House ◽

And Control

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Real-time monitoring and control of porosity defects during arc welding of aluminum alloys

Journal of Materials Processing Technology ◽

10.1016/j.jmatprotec.2020.116832 ◽

2020 ◽

Vol 286 ◽

pp. 116832

Author(s):

Yiming Huang ◽

Yuxue Yuan ◽

Lijun Yang ◽

Di Wu ◽

Shanben Chen

Keyword(s):

Aluminum Alloys ◽

Real Time ◽

Arc Welding ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Porosity Defects ◽

And Control

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A Microcomputer System for Real-Time Monitoring and Control of Gas Chromatographs

Journal of Chromatographic Science ◽

10.1093/chromsci/14.6.274 ◽

1976 ◽

Vol 14 (6) ◽

pp. 274-278 ◽

Cited By ~ 1

Author(s):

L. F. Donaghey ◽

G. M. Bobba ◽

D. Jacobs

Keyword(s):

Real Time ◽

Microcomputer System ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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A Real-time Monitoring and Control System for Crop

Proceedings of the 2019 2nd International Conference on Algorithms, Computing and Artificial Intelligence ◽

10.1145/3377713.3377742 ◽

2019 ◽

Author(s):

Tianyu Feng ◽

Yueting Chai ◽

Yadong Huang ◽

Yi Liu

Keyword(s):

Control System ◽

Real Time ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Monitoring And Control System ◽

And Control

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Real Time Monitoring and Control of a Hybrid Bicycle - A Sliding Mode Approach

2018 15th International Workshop on Variable Structure Systems (VSS) ◽

10.1109/vss.2018.8460373 ◽

2018 ◽

Author(s):

Sumesh Sankar ◽

P. S Lal Priya ◽

S. Indulal

Keyword(s):

Real Time ◽

Sliding Mode ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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