Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 4107-4110 ◽  
Author(s):  
Reo Kometani ◽  
Takahiko Morita ◽  
Keiichiro Watanabe ◽  
Kazuhiro Kanda ◽  
Yuichi Haruyama ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Nanostructure Fabrication ◽  
Glass Capillary

GaN nanostructure fabrication by focused-ion-beam-assisted chemical vapor deposition

2005 ◽  
Vol 87 (1) ◽  
pp. 013103 ◽  
Author(s):  
T. Nagata ◽  
P. Ahmet ◽  
Y. Sakuma ◽  
T. Sekiguchi ◽  
T. Chikyow
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Nanostructure Fabrication

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

2000 ◽  
Vol 18 (6) ◽  
pp. 3181 ◽  
Author(s):  
Shinji Matsui ◽  
Takashi Kaito ◽  
Jun-ichi Fujita ◽  
Masanori Komuro ◽  
Kazuhiro Kanda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Nanostructure Fabrication

Performance of nanomanipulator fabricated on glass capillary by focused-ion-beam chemical vapor deposition

2005 ◽  
Vol 23 (1) ◽  
pp. 298 ◽  
Author(s):  
Reo Kometani ◽  
Takayuki Hoshino ◽  
Kazushige Kondo ◽  
Kazuhiro Kanda ◽  
Yuichi Haruyama ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Glass Capillary
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