SiO2Formation by Oxidation of Crystalline and Hydrogenated Amorphous Si in Atmospheric Pressure Plasma Excited by Very High Frequency Power
2008 ◽
Vol 47
(3)
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pp. 1884-1888
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2015 ◽
Vol 212
(7)
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pp. 1571-1577
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2014 ◽
Vol 2
(3)
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pp. 386-394
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2012 ◽
Vol 27
(1)
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pp. 425-435
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2018 ◽
Vol 33
(12)
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pp. 10748-10763
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2019 ◽
Vol 34
(12)
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pp. 12181-12192
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