Optical Properties of Amorphous AlN Thin Films on Glass and Silicon Substrates Grown by Single Ion Beam Sputtering

2010 ◽  
Vol 49 (9) ◽  
pp. 095802 ◽  
Author(s):  
Fatemeh Hajakbari ◽  
Majid Mojtahedzadeh Larijani ◽  
Mahmood Ghoranneviss ◽  
Morteza Aslaninejad ◽  
Alireza Hojabri
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Ion Beam ◽  
Silicon Substrates ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Optical Properties of TiO^2-SiO^2 Mixture Thin Films Produced by Ion-Beam Sputtering

2007 ◽  
Author(s):  
Tatiana V. Amotchkina ◽  
Detlev Ristau ◽  
Marc Lappschies ◽  
Marco Jupe ◽  
Alexander V. Tikhonravov ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Deposition and Characterisation of SrTiO 3 Thin Films Deposited by Ion Beam Sputtering on Platinized Silicon Substrates

2003 ◽  
Vol 288 (1) ◽  
pp. 121-132 ◽  
Author(s):  
Emmanuel Defaÿ ◽  
Bernard André ◽  
Françoise Baume ◽  
Gérard Tartavel ◽  
Denise Muyard ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Silicon Substrates ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

scholarly journals Preparation of AlN Thin Films by Reactive Ion Beam Sputtering and The Optical Properties

1996 ◽  
Vol 80 (Appendix) ◽  
pp. 273-273
Author(s):  
Ryuji Tsuchiya ◽  
Takahiro Hosoda ◽  
Yasuo Nakagawa ◽  
Fumio Ohtani ◽  
Tamaki Yaji
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Internal stress and optical properties of Nb_2O_5 thin films deposited by ion-beam sputtering

2002 ◽  
Vol 41 (10) ◽  
pp. 2043 ◽  
Author(s):  
Cheng-Chung Lee ◽  
Chuen-Lin Tien ◽  
Jin-Cherng Hsu
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Internal Stress ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Preparation of thin films of (Tb,Dy)Fe2 giant magnetostrictive alloy by ion beam sputtering process.

1996 ◽  
Vol 8 (1/2) ◽  
pp. 27-28
Author(s):  
Mitsuhiro WADA ◽  
Yoshihito MATSUMURA ◽  
Hirohisa UCHIDA ◽  
Haru-Hisa UCHIDA ◽  
Hideo KANEKO
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering
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