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Preparation of AlN Thin Films by Reactive Ion Beam Sputtering and The Optical Properties
JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN
◽
10.2150/jieij1980.80.appendix_273
◽
1996
◽
Vol 80
(Appendix)
◽
pp. 273-273
Author(s):
Ryuji Tsuchiya
◽
Takahiro Hosoda
◽
Yasuo Nakagawa
◽
Fumio Ohtani
◽
Tamaki Yaji
Keyword(s):
Thin Films
◽
Optical Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
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Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering
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Optical Properties of TiO^2-SiO^2 Mixture Thin Films Produced by Ion-Beam Sputtering
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Optical properties of fluorocarbon thin films prepared by ion beam sputtering of PTFE
Optical Interference Coatings
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◽
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Study of structural and optical properties of zirconium carbide (ZrC) thin-films deposited by ion beam sputtering for soft x-ray optical applications
Surface and Coatings Technology
◽
10.1016/j.surfcoat.2015.03.033
◽
2015
◽
Vol 272
◽
pp. 409-414
◽
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Author(s):
Amol Singh
◽
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◽
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◽
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Keyword(s):
Thin Films
◽
Optical Properties
◽
Ion Beam
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Ion Beam Sputtering
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Structural And Optical Properties
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Optical Applications
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Optical Properties of Amorphous AlN Thin Films on Glass and Silicon Substrates Grown by Single Ion Beam Sputtering
Japanese Journal of Applied Physics
◽
10.1143/jjap.49.095802
◽
2010
◽
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(9)
◽
pp. 095802
◽
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Author(s):
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◽
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◽
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◽
Alireza Hojabri
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Optical Properties
◽
Ion Beam
◽
Silicon Substrates
◽
Ion Beam Sputtering
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Internal stress and optical properties of Nb_2O_5 thin films deposited by ion-beam sputtering
Applied Optics
◽
10.1364/ao.41.002043
◽
2002
◽
Vol 41
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◽
pp. 2043
◽
Cited By ~ 54
Author(s):
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◽
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◽
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Keyword(s):
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◽
Optical Properties
◽
Internal Stress
◽
Ion Beam
◽
Ion Beam Sputtering
◽
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Effects of annealing on the structural and optical properties of zinc sulfide thin films deposited by ion beam sputtering
Materials Science in Semiconductor Processing
◽
10.1016/j.mssp.2014.05.055
◽
2014
◽
Vol 26
◽
pp. 561-566
◽
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◽
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◽
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◽
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◽
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Thin Films
◽
Optical Properties
◽
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◽
Ion Beam
◽
Ion Beam Sputtering
◽
Structural And Optical Properties
◽
Beam Sputtering
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Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering
Materials Science and Engineering B
◽
10.1016/j.mseb.2004.12.055
◽
2005
◽
Vol 118
(1-3)
◽
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◽
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◽
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◽
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◽
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◽
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◽
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Keyword(s):
Thin Films
◽
Residual Stress
◽
Optical Properties
◽
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◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Preparation of thin films of (Tb,Dy)Fe2 giant magnetostrictive alloy by ion beam sputtering process.
Journal of Advanced Science
◽
10.2978/jsas.8.27
◽
1996
◽
Vol 8
(1/2)
◽
pp. 27-28
Author(s):
Mitsuhiro WADA
◽
Yoshihito MATSUMURA
◽
Hirohisa UCHIDA
◽
Haru-Hisa UCHIDA
◽
Hideo KANEKO
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
EFFECT OF DEPOSITION CONDITION ON THE FERROELECTRIC PROPERTIES OF BARIUM SODIUM NIOBATE THIN FILMS DEPOSITED BY ION BEAM SPUTTERING
Integrated Ferroelectrics
◽
10.1080/10584580600657484
◽
2006
◽
Vol 80
(1)
◽
pp. 163-172
Author(s):
JUNHUI LOU
◽
HEE YOUNG LEE
◽
JEONG-JOO KIM
◽
SANG-HEE CHO
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ferroelectric Properties
◽
Deposition Condition
◽
Sodium Niobate
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
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