Oxygen Transport Mechanism in Czochralski Silicon Melt: I . The Whole Bulk Melt

1995 ◽  
Vol 142 (8) ◽  
pp. 2839-2844 ◽  
Author(s):  
Shinji Togawa ◽  
Yutaka Shiraishi ◽  
Kazutaka Terashima ◽  
Shigeyuki Kimura
Keyword(s):  
Oxygen Transport ◽  
Transport Mechanism ◽  
Czochralski Silicon ◽  
Silicon Melt

Oxygen Transport Mechanism in Czochralski Silicon Melt: II . Vicinity of Growth Interface

1995 ◽  
Vol 142 (8) ◽  
pp. 2844-2848 ◽  
Author(s):  
Shinji Togawa ◽  
Yutaka Shiraishi ◽  
Kazutaka Terashima ◽  
Shigeyuki Kimura
Keyword(s):  
Oxygen Transport ◽  
Transport Mechanism ◽  
Growth Interface ◽  
Czochralski Silicon ◽  
Silicon Melt

Oxygen transport analysis in Czochralski silicon melt by considering the oxygen evaporation from the melt surface

1995 ◽  
Vol 148 (1-2) ◽  
pp. 70-78 ◽  
Author(s):  
Shinji Togawa ◽  
Xinming Huang ◽  
Koji Izunome ◽  
Kazutaka Terashima ◽  
Shigeyuki Kimura
Keyword(s):  
Oxygen Transport ◽  
Czochralski Silicon ◽  
Silicon Melt ◽  
Transport Analysis
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