Numerical simulation of oxygen transport during the Czochralski silicon crystal growth with a cusp magnetic field

2014 ◽  
Vol 401 ◽  
pp. 888-894 ◽  
Author(s):  
J.-C. Chen ◽  
P.-C. Guo ◽  
C.-H. Chang ◽  
Y.-Y. Teng ◽  
C. Hsu ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Numerical Simulation ◽  
Crystal Growth ◽  
Oxygen Transport ◽  
Silicon Crystal ◽  
Czochralski Silicon ◽  
Cusp Magnetic Field

Experiment and numerical simulation of melt convection and oxygen distribution in 400-mm Czochralski silicon crystal growth

Rare Metals ◽  
2017 ◽  
Vol 36 (2) ◽  
pp. 134-141 ◽  
Author(s):  
Ran Teng ◽  
Yang Li ◽  
Bin Cui ◽  
Qing Chang ◽  
Qing-Hua Xiao ◽  
...  
Keyword(s):  
Numerical Simulation ◽  
Crystal Growth ◽  
Silicon Crystal ◽  
Oxygen Distribution ◽  
Czochralski Silicon ◽  
Melt Convection

Silicon crystal growth in a cusp magnetic field

1989 ◽  
Vol 96 (4) ◽  
pp. 747-755 ◽  
Author(s):  
Hiroshi Hirata ◽  
Keigo Hoshikawa
Keyword(s):  
Magnetic Field ◽  
Crystal Growth ◽  
Silicon Crystal ◽  
Cusp Magnetic Field
Sign in / Sign up

Export Citation Format

Share Document