Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: II . Influence of Dopants

Journal of The Electrochemical Society ◽

10.1149/1.2086278 ◽

1990 ◽

Vol 137 (11) ◽

pp. 3626-3632 ◽

Author(s):

H. Seidel ◽

L. Csepregi ◽

A. Heuberger ◽

H. Baumgärtel

Keyword(s):

Crystalline Silicon ◽

Anisotropic Etching ◽

Alkaline Solutions

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Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

Journal of The Electrochemical Society ◽

10.1149/1.2086277 ◽

1990 ◽

Vol 137 (11) ◽

pp. 3612-3626 ◽

Cited By ~ 1200

Author(s):

H. Seidel ◽

L. Csepregi ◽

A. Heuberger ◽

H. Baumgärtel

Keyword(s):

Crystalline Silicon ◽

Orientation Dependence ◽

Anisotropic Etching ◽

Alkaline Solutions ◽

Passivation Layers ◽

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Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/20/1/015019 ◽

2009 ◽

Vol 20 (1) ◽

pp. 015019 ◽

Author(s):

Y Xing ◽

M A Gosálvez ◽

K Sato ◽

H Yi

Keyword(s):

Surface Morphology ◽

Cellular Automaton ◽

Crystalline Silicon ◽

Anisotropic Etching

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Study of surface morphology and optical characterization of crystalline and multi-crystalline silicon surface textured in highly diluted alkaline solutions

Journal of Engineering Research ◽

10.7603/s40632-014-0009-9 ◽

2014 ◽

Vol 2 (2) ◽

Author(s):

Ali T. Hajjiah ◽

Suji K Zachariah ◽

Moustafa Y. Ghannam

Keyword(s):

Surface Morphology ◽

Silicon Surface ◽

Crystalline Silicon ◽

Optical Characterization ◽

Alkaline Solutions

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Silicon anisotropic etching in alkaline solutions IV

Sensors and Actuators A Physical ◽

10.1016/s0924-4247(00)00481-7 ◽

2001 ◽

Vol 87 (3) ◽

pp. 163-171 ◽

Author(s):

Irena Zubel ◽

Irena Barycka ◽

Kamilla Kotowska ◽

Małgorzata Kramkowska

Keyword(s):

Anisotropic Etching ◽

Alkaline Solutions

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Investigations on the correlation between surface texturing histogram and the spectral reflectance of (100) Crystalline Silicon Substrate textured using anisotropic etching

Sensors and Actuators A Physical ◽

10.1016/j.sna.2017.06.021 ◽

2017 ◽

Vol 263 ◽

pp. 445-450 ◽

Author(s):

B.S. Akila ◽

K. Vaithinathan ◽

T. Balaganapathi ◽

S. Vinoth ◽

P. Thilakan

Keyword(s):

Silicon Substrate ◽

Spectral Reflectance ◽

Crystalline Silicon ◽

Surface Texturing ◽

Anisotropic Etching

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Investigation of silicon anisotropic etching in alkaline solutions with propanol addition

2008 26th International Conference on Microelectronics ◽

10.1109/icmel.2008.4559295 ◽

2008 ◽

Author(s):

V. Jovic ◽

J. Lamovec ◽

M. Popovic

Keyword(s):

Anisotropic Etching ◽

Alkaline Solutions

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a-C:H Films deposited on crystalline silicon to masking it anisotropic etching by aqueous ethylenediamine solution

Microelectronics Journal ◽

10.1016/s0026-2692(00)00076-8 ◽

2001 ◽

Vol 32 (1) ◽

pp. 49-51

Author(s):

A Fissore ◽

M.A.R Alves ◽

E da Silva Braga ◽

L Cescato

Keyword(s):

Crystalline Silicon ◽

Anisotropic Etching

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Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/23/5/055024 ◽

2013 ◽

Vol 23 (5) ◽

pp. 055024 ◽

Author(s):

Erwin J W Berenschot ◽

Henri V Jansen ◽

Niels R Tas

Keyword(s):

Crystalline Silicon ◽

Anisotropic Etching ◽

Single Crystalline Silicon ◽

Fractal Structures ◽

Single Crystalline

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Effectiveness of anisotropic etching of silicon in aqueous alkaline solutions

Solar Energy Materials and Solar Cells ◽

10.1016/s0927-0248(00)00414-1 ◽

2001 ◽

Vol 70 (1) ◽

pp. 103-113 ◽

Author(s):

P.K. Singh ◽

R. Kumar ◽

M. Lal ◽

S.N. Singh ◽

B.K. Das

Keyword(s):

Anisotropic Etching ◽

Alkaline Solutions

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Analysis of Interaction of Surfactant Molecules with Si(hkl) Planes on the Basis of Anisotropic Etching in Alkaline Solutions

Acta Physica Polonica A ◽

10.12693/aphyspola.116.s-105 ◽

2009 ◽

Vol 116 (Supplement) ◽

pp. S-105-S-107 ◽

Author(s):

I. Zubel ◽

M. Kramkowska

Keyword(s):

Anisotropic Etching ◽

Alkaline Solutions

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