In Situ Characterization of Gas-Phase Species Present During Hafnium Oxide Atomic Layer Deposition
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2017 ◽
Vol 340
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pp. 89-97
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Keyword(s):
2014 ◽
Vol 118
(48)
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pp. 27749-27753
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Keyword(s):
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Keyword(s):
1999 ◽
Vol 09
(PR8)
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pp. Pr8-1021-Pr8-1028
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