In situ gas phase infrared absorption measurements during hafnium oxide atomic layer deposition

2007 ◽  
Author(s):  
J.E. Maslar ◽  
W.S. Hurst ◽  
D.R. Burgess ◽  
W.A. Kimes ◽  
N.V. Nguyen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Phase ◽  
Infrared Absorption ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Absorption Measurements

In Situ Gas Phase Diagnostics for Hafnium Oxide Atomic Layer Deposition

2019 ◽  
Vol 13 (2) ◽  
pp. 139-149 ◽  
Author(s):  
James E. Maslar ◽  
W.S. Hurst ◽  
D.R. Burgess ◽  
William Kimes ◽  
Nhan V. Nguyen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Phase ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

In Situ Characterization of Gas-Phase Species Present During Hafnium Oxide Atomic Layer Deposition

2019 ◽  
Vol 2 (7) ◽  
pp. 133-143 ◽  
Author(s):  
James E. Maslar ◽  
Wilbur Hurst ◽  
Donald Burgess ◽  
William Kimes ◽  
Nhan Nguyen
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Phase ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition

In Situ Gas-Phase Diagnostics for Titanium Nitride Atomic Layer Deposition

2019 ◽  
Vol 41 (2) ◽  
pp. 157-167 ◽  
Author(s):  
James E. Maslar ◽  
William Kimes ◽  
Brent Sperling
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Nitride ◽  
Gas Phase ◽  
Atomic Layer ◽  
Layer Deposition
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